Hoffman D.M., Singh B., Thomas J.H. (Eds). Handbook of Vacuum Science and Technology

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422 Chapter 4.2: Flange and Component Systems

lection of a CF flange for tubing larger than 10 inches is confusing. For instance,

10-inch-diameter tubing is the maximum size for both 12-inch and 13.25-inch

O.D. flanges. Likewise, 14.0- and 14.5-inch O.D. flanges are made for 12-inch-

diameter tubing. When specifying a large CF flange, important dimensions and

the number of bolt holes should be stated. Most interface dimensions on the larger

flanges are made to vacuum industry customary standards, so that flanges from

different manufacturers are interchangeable.

4.2.3.4 ASA (ANSI) Flanges

Although in declining use today, ASA (American Standards Association) or ANSI

(American National Standards Institute) flanges are one of the oldest flange sys-

tems used in building metal vacuum systems in the United States. ASA (ANSI)

flanges remain an option on many types of high-vacuum pumps. These flanges

were adapted to vacuum service from the 150-lb ASA (ANSI) flanges used with

steam or compressed air. They are 0-ring sealed, held together with bolts and are

available for tubing sizes from 1.5 inches to 12 inches. Typical applications are

on industrial vacuum systems.

A nonrotatable ASA (ANSI) flange is illustrated in Table 6. Unlike the ISO or

CF flanges, these flanges are not sexless because one flange of the pair usually

contains an 0-ring groove. Occasionally they are sealed with a flat elastomer gas-

ket or with an 0-ring in a carrier. To allow alignment of components, rotatable

ASA (ANSI) flanges with a bolt ring and a separate insert containing the seal area

are made specifically for vacuum service. The rotatable flanges are also available

with or without 0-ring grooves.

The sizing of an ASA (ANSI) flange can be confusing. Sometimes they are

referred to by the maximum bore suggested by the ANSI 150-lb standard, and

sometimes by the outside diameter of the flange. An additional complication is

that the bore in a flange for vacuum service is frequently larger than the ANSI

nominal. For instance, a "6-inch ASA" flange, which has an 11.0-inch O.D., can

have a bore as large as 8.0 inches.

Table 6 gives dimensions of ASA (ANSI) flanges used in vacuum service.

Flange outside diameter, bolt circle diameter, and number of bolts are standard-

ized. However, the bore, 0-ring groove dimensions, the size of the 0-ring used,

flange thickness, and bolt sizes are not uniform within the industry. When se-

lecting ASA flanges, the user must specify the O.D., the bore, whether it is to be

rotatable, whether it is to have an 0-ring groove, and if so, the 0-ring size or

number.

4.2.3 Common Flange Systems

423

Table

Typical Dimensions of ASA (ANSI) Flanges for Vacuum Service.

The ANSI nominal size has been listed for reference.

0-ring

groove dimensions and flange

thickness are not standardized within the vacuum industry. Two-piece rotatable flanges are available,

but may be slightly thicker than indicated. (Reproduced with the permission of HPS Division

of MKS Instruments, Inc., Boulder, Colorado.)

O'RING

GROOVE (opt)

1 ^

ANSI

Size

(in)

Nominal

Tube

Diameter"

1.5

(38)

2.5

(63.5)

3.5

(88.9)

4.0

(102)

6.0

(152)

8.0

(203)

(305)

Outside

Diameter

4.25

(108.0)

5.00

(127.0)

6.00

(152.4)

7.50

(190.5)

9.00

(228.6)

11.00

(279.4)

16.00

(406.4)

Thickness

0.50

(12.7)

0.50

(12.7)

0.50

(12.7)

0.50

(12.7)

0.50

(12.7)

0.75

(19.0)

0.75

(19.0)

Bolt

Circle

Diameter

3.12

(79.4)

3.88

(98.4)

4.75

(120.7)

6.00

(152.4)

7.50

(190.5)

9.50

(241.3)

14.25

(362.0)

Through

Hole

Diameter''

0.625

(15.9)

0.625

(15.9)

0.75

(19.0)

0.75

(19.0)

0.75

(19.1)

0.812

(20.6)

0.812

(20.6)

Number

of Holes

"Given as approximate maximum.

''Smaller bolts often used.

Dimensions:

inch

(mm)

424 Chapter 4.2: Flange and Component Systems

4.2.3.5 ]1S Flanges

An 0-ring sealed and bolted flange that might be encountered, particularly in

equipment made in Japan, is the JIS (Japanese Industry Standard) flange. These

flanges are made in nominal sizes from 10 to 1000 mm, for tubing from 17.3 to

1016 mm in diameter. In a typical

joint,

one flange contains an 0-ring groove and

the other does not. However, there are adaptors available that allow two identical

flanges to be joined. If both flanges are without 0-ring grooves, the adaptor has

0-ring grooves on both sides. If both flanges contain 0-ring grooves, then the

adaptor is smooth on both sides.

4.2.3.6 Large Wire-Sealed Flanges

Metal-wire-sealed flanges are commercially available in 12- to 27-inch outside

diameters, for tubing from 10 to 24 inches in diameter. Typical applications are

metal bell jars or large custom chambers. Figure 6 illustrates the sealing principle

of these flanges. The seal is a metal wire, usually copper, contained in grooves on

the mating flanges. The flanges are sexed, with a tongue and groove to provide

centering and to limit compression of the seal. Some flanges using this sealing

principle are held together with bolts, while others use special clamps that pro-

vide sealing force directly over the seal.

4.2.3.7 Rectangular Flanges

In some applications, it is advantageous to use a non-circular flange. One rectan-

gular flange for which standards exist is the MESA (Modular Equipment Standards

Architecture) or SEMI (Semiconductor Equipment and Materials International)

flange

[4].

This flange was designed for the transfer of wafers through load-locks

in semiconductor fabrication equipment. Valves with these flanges are commer-

cially available.

4.2.4 Components with Flanges Attached

425

Fig.

Sealing principle used

large wire-sealed flanges.

rSeol force

/ire seal

Female flange

Male flange

The tongue

and

groove arrangement centers

the

flanges.

The

seal force

can be

provided

bolts or special claw clamps.

Table

illustrates this flange

and

lists some

key

dimensions. SEMI flanges

are

0-ring sealed,

and a

flange pair is held together with the claw clamps used

for the

larger ISO flanges described earlier.

The

SEMI standard specifies

the

seal region

the

flange face

and

also that

the

smooth flange without

the

0-ring groove

to face the transport module side.

The

flange containing

the

0-ring

specified

face toward

cassette

process module.

dowel

either side

the port

as-

sist

aligning the flanges. Two sizes

the flange

are

specified

the SEMI stan-

dard,

one for

200-min wafers

and one for

300-mm wafers.

The

flange design

has

been adapted

other sizes

component manufacturers.

4.2.4

COMPONENTS WITH FLANGES ATTACHED

Components such as valves, elbows. Tees, and crosses are commercially available

in many

the flanging systems described above. This allows quick and easy con-

426

Chapter 4.2: Flange and Component Systems

Table

Dimensions of SEMI (Semiconductor Equipment and Materials International) or MESA

(modular equipment standards architecture) Rectangular Flanges for Passage of 200-mm and

300-mm Wafers. The flanges are

0-ring

sealed, and a

flange

without

0-ring

groove is illustrated.

Claw clamps as used on ISO

O-ring

sealed flanges provide the sealing force.

Pins for aligning

flanges (2X)

0.472

(12.0mm)

(\i

1 r~

0.394

(10.0mm)

0.295

- (7.5)

Groove for ISO

clow clamp

Intended

Wafer

Size

gin

(200 mm)

(300 mm)

Outside

Width

(W)

13.39

(340)

17.32

(440)

Minimum

Outside Port

Height Width

(//) (L)

6.38 8.74

(162) (222)

6.38 12.68

(162) (322)

inch

Dimensions:

Port

Height

(K)

1.26

(32)

1.26

(32)

Locating

Spacing

(S)

11.81

(300)

15.75

(400)

Locating

Offset

(J)

1.97

(50)

1.97

(50)

(mm)

4.2.4 Components with Flanges Attached 427

struction or modification of a vacuum system. In this section, dimensions are

given for identification of components and to indicate what is available.

4.2.4.1 Components with ISO-Type Flanges

The ISO standard ISO 9803:1993(E), "Vacuum Technology—Pipeline Fittings —

Mounting Dimensions," provides standards for the flange face to center line di-

mension on elbows, Tees, and crosses with ISO flanges. The dimension for el-

bows is frequently used on right-angle valves. When the standards are followed,

the flanges and components form a very modular system. One component can be

easily exchanged with another without disturbing the rest of the system. In addi-

tion, interchangeability between manufacturers is assured.

Table 8 gives the flange face to centerline dimensions, sometimes referred to as

the "modulus," for KF-flanged components. Dimensions of MF-flanged compo-

nents are given in Table 9. In all cases the component is referenced by the nomi-

nal size of the flange used. The spacing between opposed flanges, dimension "L"

in either table, on a cross or Tee is twice the modulus. The components illustrated

have the same size flange on all ports. The ISO standard applies to components

made with either bolted or clamped-type flanges. However, the larger components

are usually made with clamped flanges (ISO-MF), since these flanges are infi-

nitely rotatable.

The customary tubing size used in the United States for the component body is

listed for reference in Tables 8 and 9. This dimension is not specified in the ISO

standard, and may depend on the country of origin. However, it is usually unim-

portant, and components are fully interchangeable if the modulus is maintained.

Some manufacturers offer components with nominal 320 and larger flanges.

However, at the present time, the ISO standard does not address the dimensions of

components in sizes larger than 250. Also, the ISO standard does not specify any

value for elbow. Tee, and cross dimensions in the 50, 80, and 200 nominal sizes.

As explained earlier in the ISO flange section, flanges of these nominal bores are

not from the "first preference series." The values given here in these three sizes

are used by most U.S. and European manufacturers but may not represent prod-

ucts from all manufacturers.

Many other components such as crosses with five or six arms. Tees with a mix-

ture of flange sizes, as well as adaptors between flange sizes and other flange sys-

tems are available. None of these components are described or dimensioned by

ISO standards, but they increase the usefulness of the system.

Table 8

Dimensions of Elbows, Tees, and Four-Way Crosses with KF Flanges. Flanges on all ports are the

same size. Dimensions in the NW 16, 25, and 40 sizes are set by ISO (International Standards

Organization). The values listed for the NW 50 size are used by both U.S. and European

manufacturers. At the present time, ISO does not specify these dimensions for the NW 50 size.

ISO

Flange

Size"

(mm)

NW16

NW25

NW40

NW50

Customary

U.S.

Tubing

Diameter

(reference)

(in)

0.75

LOO

1.50

2.00

1.57

(40)

1.97

(50)

2.56

(65)

2.76

(70)

3.15

(80)

3.94

(100)

5.12

(130)

5.51

(140)

"NW is retained by convention. It does not specify the flange type, but is

from the German Nennweite, meaning "nominal diameter."

inch

Dimensions:

(mm)

Table

Dimensions of Elbows, Tees, and Four-Way Crosses with Larger ISO (International Standards

Organization) 0-Ring-Sealcd Type Flanges. Flanges on all ports are the same size. The dimensions

are set by ISO except in the NW 80 and NW 200 sizes. The values given for the NW 80 and NW 200

sizes are typical, and may not represent products from all manufacturers.

ISO

Bange

Size"

(mm)

NW63

NW80

NWlOO

NW160

NW200

NW250

Customary

U.S.

Tubing

Diameter

(reference)

(in)

2.50

3.00

4.00

6.00

8.00

10.00

3.46

(88)

3.86

(98)

4.25

(108)

5.43

(138)

6.61

(168)

8.19

(208)

6.93

(176)

7.72

(196)

8.50

(216)

10.87

(276)

13.23

(336)

16.38

(416)

"NW is retained by convention. It does not specify the flange type, but is from the

German Nennweite, meaning "nominal diameter."

inch

Dimensions:

(mm)

430 Chapter 4.2: Flange and Component Systems

4.2.4.2 Components with Knife-Edge Seal Flanges

Unlike ISO-flanged components, there is no standard for the dimensions of com-

ponents with knife-edge flanges. However, most

U.S.

manufacturers of CF-flanged

components make parts to the same customary dimensions so that there is inter-

changeability between manufacturers.

These dimensions are given in Table 10 for the most common flange sizes. The

table is organized by the outside diameter of

the

flange and the flanges on all ports

are the same O.D. To ensure rotational alignment, the indicated combination of

rotatable and nonrotable flanges is necessary. The long dimension of

Tee or cross

is again twice the modulus. Catalogues from CF flange manufacturers list addi-

tional components, such as crosses with five and six arms, and Tees with different-

size flanges.

4.2.4.3 Components with ASA-Type Flanges

Valves, elbows, Tees, and crosses with ASA (ANSI) flanges are conmiercially

available. However, there is little standardization of flange face to centerline di-

mension or tubing size for the component, especially in the larger sizes. For this

reason, dimensions of components are not tabulated here. When purchasing com-

ponents, including valves, for use with existing ones or components from mul-

tiple manufacturers, users should verify that critical dimensions are identical.

Also,

the position and size of

0-ring

grooves must be considered and specified.

Adaptors are also available to other flange systems.

TRADEMARKS

Viton is a registered trademark of

I. DuPont de Nemours & Co., Inc., Wilmington, DE.

ConFlat is a registered trademark of Varian Vacuum Products, Lexington, MA.

Table

Customary Dimensions Used by U.S. Manufacturers of Elbows, Tees, and Four-Way Crosses with

Metal-Sealed Knife-Edge Flanges. Flanges on all ports have the same outside diameter. The

combination of rotatable and nonrotatable flanges is used to provide rotational alignment.

Nonrotatable Flange

Nominal

Flange Size

(in)

1.33

2.12

2.75

3.37

4.5

4.62

6.0

8.0

10.0

Nominal

Tubing

Diameter

0.75

(19.0)

1.00

(25.4)

1.50

(38.1)

2.00

(50.8)

2.50

(63.5)

3.00

(76.2)

4.00

(102.0)

6.00

(152.0)

8.00

(203.0)

Dimensions:

1.50

(38.1)

2.06

(52.3)

2.46

(62.5)

3.21

(81.5)

4.13

(105.0)

4.94

(125.5)

5.31

(135.0)

6.56

(167.0)

8.00

(203.0)

inch

3.00

(76.2)

4.12

(104.6)

4.92

(125.0)

6.42

(166.0)

8.26

(210.0)

9.88

(251.0)

10.62

(270.0)

13.12

(333.0)

16.00

(406.0)

(mm)