Bichop R.H. (Ed.) Mechatronic Systems, Sensors, and Actuators: Fundamentals and Modeling

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21-132 Mechatronic Systems, Sensors, and Actuators

micromotors can be straightforwardly fabricated and this will enable their wide applications as microac-

tuators and microsensors. However, the axial micromotors must be designed and optimized to attain good

performance. The optimization is based upon electromagnetic, mechanical, and thermal design. The

micromotor optimization can be carried out using the steady-state concept (finite element analysis) and

dynamic paradigms (lumped-parameters models or complete electromagnetic-mechanical-thermal high-

fidelity mathematical models derived as a set of partial differential equations using Maxwell’s, torsional-

mechanical, and heat equations). In general, the nonlinear optimization problems are needed to be

addressed, formulated, and solved to guarantee the superior microtransducer performance. In addition

to the microtransducer design, one must concentrate the attention on the ICs and controller design. In

particular, the circuitry is designed based upon the converter and inverter topologies (e.g., hard- and soft-

switching, one-, two-, or four-quadrant, etc.), filters and sensors used, rated voltage and current, etc. From

the control prespective, the electromagnetic features must be thoroughly examined. For example, the

electromagnetic micromotor studied is the synchronous micromachine. Therefore, to develop the elec-

tromagnetic torque, the voltages applied to the stator windings must be supplied as the functions of the

rotor angular displacement. Therefore, the Hall-effect sensors must be used, or the so-called sensorless

controllers (the rotor position is observed or estimated using the directly measured variables) must be

designed and implemented using ICs. This brief discussion illustrates a wide spectrum of fundamental

problems involved in the design of integrated microtransducers with controlling and signal processing ICs.

21.5.11 Conclusions

The critical focus themes in MEMS development and implementation are rapid synthesis, design, and

prototyping through synergetic multi-disciplinary system-level research in electromechanics. In partic-

ular, MEMS devising, modeling, simulation, analysis, design and optimization, which is relevant to

cognitive study, classification, and synthesis must be performed. As microtransducers and MEMS are

devised, the fabrication techniques and processes are developed and carried out. Devising microtrans-

ducers is the closed evolutionary process to study possible system-level evolutions based upon synergetic

integration of microscale structures and devices in the unified functional core. The ability to devise and

optimize microtransducers to a large extent depends on the validity and integrity of mathematical models.

Therefore, mathematical models for different microtransducers were derived and analyzed. It is docu-

mented that microtransducer modeling, analysis, simulation, and design must be based on reliable

mathematical models which integrate nonlinear electromagnetic features. It is important to emphasize

that the secondary phenomena and effects, usually neglected in conventional miniscale electromechanical

motion devices (modeled using lamped-parameter models and analyzed using finite element analysis

techniques) cannot be ignored. The fabrication processes were described to make high-performance

microtransducers.

References

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9258_C021_Sect002-005.fm Page 134 Wednesday, October 10, 2007 7:10 PM

Index I-1

Absolute angular optical encoders,

20-108–20-109

Absolute encoder, 20-6

Acceleration measurements

techniques, 20-12

Acceleration sensors, 17-4–17-5

accelerometers, see accelerometers

dynamics and characteristics,

20-13–20-15

in error measurements,

20-17–20-19

in signal conditioning and biasing,

20-31–20-33

types, 20-13

in vibration measurements,

20-15–20-17

Accelerometers

electromechanical, 20-23–20-24

electrostatic, 20-27–20-29

inertial, 20-19–20-23

micro/nano, 20-30–20-31

piezoelectric, 20-24–20-25

piezoresistive, 20-25–20-26

silicon microfabricated, 5-8

strain-gauge, 20-26–20-27

AC inductive sensor, 20-9

AC machines

induction motors, 21-43–21-50

synchronous motors, 21-41–21-43

AC network analysis, 11-21–11-27

ACSL, 2-10

Active linear region, 21-21

Actuation force, of the comb-drive

configuration, 5-3

Actuators

characteristics

backlash, 19-6

deadband, 19-7–19-8

eccentricity, 19-6

errors, 19-2

first-order system response,

19-8–19-9

frequency response,

19-12–19-14

impedance, 19-4–19-5

linearity and accuracy,

19-3–19-4

nonlinearities, 19-5

range of, 19-1

repeatability, 19-3

resolution of, 19-2

saturation, 19-7

second-order system response,

19-9–19-11

sensitivity of, 19-2

static and Coulomb friction,

19-5

system response, 19-8

classification, 17-11–17-13

principle of operation

alternate current motors, 17-14

electrical actuators, 17-13

electromagnetic actuators,

17-14–17-15

electromechanical actuators,

17-13–17-14

hydraulic and pneumatic

actuators, 17-15

micro and nanoactuators,

17-18

smart material actuators,

17-15–17-18

stepper motors, 17-14

ultrasonic actuators, 17-19

selection criteria, 17-19–17-20

ADAMS, 7-6

Adaptive friction compensation,

2-4

Air-standard analysis, 12-27, 12-29

ALAMBETA device, 4-3

Alternate current motors, 17-14

Ammeter, 11-14

Ampere circuital law, 21-119

Amperes law, 7-13

Analog Devices’ accelerometer, 14-9

Analog Hall sensors, 20-10–20-11

Analogies, in physical system models

force-current analogy

beyond one-dimensional

mechanical systems, 16-3

drawbacks, 16-2

intuitions in processes,

16-3–16-4

measurement as a basis, 16-3

graphical representations,

16-8–16-9

history, 16-2

Maxwell’s force-voltage analogy

dependence on reference

frames, 16-5

intuitions in processes,

16-4–16-5

systems of particles, 16-4

thermodynamic basis

equilibrium and steady state,

16-6–16-7

extensive and intensive

variables, 16-6

of nocidity, 16-8

use of inertial reference frame,

16-7–16-8

Analog-to-digital converter (ADC),

3-2

Angle representation, of rotations,

9-34–9-37

Angular acceleration, 9-31, 20-14

Angular optical encoders, 20-108

Angular velocity, 9-31

Anisotropic etching, 15-6

Anode, 21-14

ANSYS software, 14-12

Antilock braking system (ABS),

1-8–1-9, 3-3

APLAC, 14-12

Application specific integrated

circuits (ASIC), 4-2

Auto CAD, 2-9

Automated paperboard container-

manufacturing machine,

1-6

Axial electromagnetic micromotors,

21-132

Band-pass filters, 3-7

Band-stop filters, 3-7

Batch-fabricated microscale systems,

15-2

Battery charging systems, 1-7

Beam-type load cells, 20-38–20-39

Bidirectional transmission, 4-7

Bimetallic thermometers, 20-76

BIOSPICE simulator, 14-8

Bipolar junction transistor (BJTs),

21-20–21-23

Bitmap (BMP), 20-155

8-bit timer/counter, 4-5

Black, H- S-, 1-3

Blocked force, 21-12

Bode, 1-3

Boit–Savart Law, 21-4–21-5

Bond graph modeling, 2-11,

9-6–9-10

Boolean algebra statements, 4-2

Boolean functions, 14-2

Boolean methods, 2-9

Bouncing circuit, 20-2

Brayton cycle, 12-25–12-26

Breakdown region, 21-15

Index

I-1

9258.index.fm Page 1 Thursday, October 4, 2007 9:27 PM

I-2 Index

Buckling analysis, 8-10–8-11

Bulk micromachined pressure sensor,

20-140–20-143

Bulk micromachining, 15-6

Bulk silicon micromachining process,

20-138

CAD/CAE tools, 2-9

Calibrations, in mechatronic system,

3-9

Capacitance, defined, 11-22

Capacitive displacement transducer,

11-25

Capacitive force transducer,

20-43–20-44

Capacitive proximity sensor, 20-114

Capacitive sensors, 20-8

Capacitors, 11-22–11-24

Carbon nanotubes (CNTs), 5-10

Cart flywheel, 9-46

Cathode, 21-14

Causality assignment, in system

models, 9-7–9-8, 9-21–9-23

Central processing unit (CPU), 4-2

Cesium oscillators, 18-12–18-13

CFD software, 14-12

Charge-coupled devices,

20-129–20-133

Checkerboard test, 3-13

Chemical sensors, 17-8

Circuit elements and their i–v

characteristics, 11-5

Closed loop transfer function, 21-83

CMOS image sensors,

20-133–20-134

Coenergy, 15-15

Color image, 20-154

Comb-drive electrostatic actuator,

5-3–5-4

Complementary metal oxide

semiconductor (CMOS)

technologies, 15-2

Complex image, 20-154

Compressibility charts, 12-15

Compression ignition engine, 12-28

Compression stroke, 12-28

Computer integrated manufacturing

(CIM), 3-10

Computer operating properly (COP)

errors, 3-13

Consolidated Micromechanical

Element Library (CaMEL),

14-14

Continuity equations, for chambers,

21-79–21-80

Contrast, 20-157

Control engineering, 1-3

Controller area network (CAN),

3-10

Control prototyping, 2-14–2-15

Control theory, 1-3

Coordinated Universal Time (UTC),

18-2

Copper–chromium seed layer,

21-112

Coriolis acceleration, 5-9

Coriolis flowmeters, 20-71

Coulomb’s law, 5-2

Coulomb model, of mechanical

systems, 9-11–9-12

Coupling mechanisms, of mechanical

systems, 9-15–9-17

Current control (mode) amplifier,

21-28–21-29

Curriculum, for mechatronics,

6-5–6-9

Curvilinear acceleration, 20-14

Cutoff region, 21-21

DADS, 7-6

D’Alembert principle, 9-48

Damping constants, 9-10

Darlington transistor pair, 21-23

Dashpot resistive model, 9-9

Data acquisition board

(DAQ board), 3-7

Data retrieval, in thermodynamics,

12-14–12-15

DC magnetic sensors, 20-9–20-11

DC motors, 21-33–21-34

efficiency of, 21-41

speed control of, 21-39–21-40

starting of, 21-39

Debouncing circuit, 20-2

Debugger, 3-13

Decoding methods, standard, 20-5

Deformation gradient, 8-4

Degrees of freedom, 9-5

Depth of field, of a lens, 20-157

Detectors

light

basic radiometry, 20-119–20-121

image formation, 20-127–20-129

image sensors, 20-129–20-134

light sources, 20-121–20-122

photon detectors, 20-123–20-127

pyroelectric detectors, 20-123

positive sensitive (PSD), 20-4

Schmitt-trigger threshold, 20-111

Diesel cycle, 12-29–12-31

Differential equations, for electrical

circuits, 11-30–11-32

Differential global positioning systems

(DGPS), 1-10

Differential output encoder, 20-6

Differential pressure flowmeters,

20-64–20-66

Diffuse proximity sensors, 20-116

Digital communications, 4-6–4-7

Digital electronics, 4-1

Digital integrated circuits, 4-1

Digital logic, 4-2

Digital signal processors (DSPs), 4-3

Digital-to-analog converter

(DAC), 3-2

Digitized image, properties,

20-153–20-154

Directional valves, 21-71–21-72

Direct memory access (DMA), 3-7

Direct piezoelectric effect, 21-11

Dissipative effects, in mechanical

systems, 9-9–9-12

Distance measuring sensors, see

Noncontact ranging sensors

Distortions, 20-157

DPST (double pole single throw)

switch, 20-2–20-3

Dual cycle, 12-29–12-31

DYMOLA, 2-9

Dynamic compliance, 21-83

Earnshaw’s theorem, 7-18–7-19

Edge

characteristics, 20-160–161

definition, 20-160

detection, 20-158–20-162

Effective number of bits (ENOB),

4-5

Effort source, defined, 9-8

Elastic buckling/ divergence, 7-18

Elastic system modeling, 7-8–7-10

Electrical actuators, 17-13

Electrical engineering

AC network analysis, 11-21–11-27

circuit elements and their

i–v characteristics, 11-5

circuits containing dynamic

elements, 11-30–11-32

electrical power and sign conven-

tion, 11-4–11-5

fundamentals of electric circuits,

11-1–11-4

measuring devices

ammeter, 11-14

voltmeter, 11-14–11-15

nonlinear circuit elements,

11-20–11-21

phasors and impedance,

-32–

-36

practical voltage and current

sources, 11-12–11-13

resistance and ohm's law

common resistor values, 11-7

open and short circuits,

11-8–11-10

parallel resistors and current

divider rule, 11-11

resistance strain gauge, 11-8

series resistors and the voltage

divider rule, 11-10–11-11

Wheatstone bridge, 11-11–11-12

resistive network analysis

mesh current method,

11-16–11-17

node voltage method,

11-15–11-16

Thévenin and Norton equivalent

circuits, 11-17–11-20

9258.index.fm Page 2 Thursday, October 4, 2007 9:27 PM

Index I-3

time-dependent signal sources,

11-28–11-30

Electrical machines

AC machines, 21-41

armature electromotive force (amf ),

21-34–21-35

armature torque, 21-35

DC motors, 21-33–21-34

methods of connection,

21-36–21-38

motor selection, 21-50–21-51

terminal voltage, 21-35–21-36

Electrical power and sign convention,

11-4–11-5

Electrical temperature sensors and

transducers, 20-78–20-84

Electric and magnetic circuits,

dynamic principles,

7-14–7-17

Electric eye, 20-115

Electric motors, 21-9–21-10

Electroactive polymer-metal

composites (EAPs),

8-13–8-16

Electrohydraulic control systems, 10-2

Electrolytic tilt sensor, 20-8

Electromagnetic actuation, 5-5–5-6

Electromagnetic actuators,

17-14–17-15

Electromagnetic flowmeters, 20-69

Electromagnetic forces, 7-10–7-14

Electromagnetic microactuators,

21-116–21-117

Electromagnetic system–geometric set,

15-5

Electromagnetic torque and force, on a

cylindrical permanent-

magnet thin film,

21-122–21-123

Electromechanical accelerometers,

20-23–20-24

Electromechanical actuators,

17-13–17-14

types

power amplifier or the driver,

21-13–21-20

using energy conversion

mechanism, 21-3–21-13

Electromechanical stability,

7-18–7-19

Electromechanical systems, models for,

7-2

Electromechanical transduction, 5-2

Electronic damping, 2-4

Electronic systems, 2-1

Electroplated aluminum, 21-112

Electrostatic accelerometers,

20-27–20-29

Electrostatic actuation, 5-3–5-5

Electrostriction, 8-5

Embedded microcomputers, 4-3

Energy flows, in the machine, 2-2

Energy methods, for modeling

mechanical system

determination and checking of

constitutive relations,

9-29–9-30

and energetically-correct constitu-

tive relations, 9-28–9-29

multiport models, 9-28

Energy storage elements, 9-12–9-13

Enthalpy-entropy (Mollier) diagram,

for water, 12-19

Equilibrium, of physical system

models, 16-6–16-7

Erasable programmable ROM

(EPROM), 3-8

Euler parameters and quaternions,

9-37–9-39

Euler’s theorem, 9-31

Exhaust stroke, 12-28

Farad, 11-22

Faraday, Michael, 1-3

Faraday–Henry law of flux change,

7-15

Faraday’s law, 5-2, 15-13, 21-3–21-4

Fault detection, classical way for, 2-8

Feedback control system, 1-3

Field of view, 20-156

Field programmable gate array

(FPGA), 4-5

Filtering, 3-7

Finite element analysis (FEA), 14-10

Finite rotations, 9-31

Fixed-point mathematics, 3-8–3-9

Flow measurement

flow characteristics, 20-62–20-63

flowmeter classification,

20-63–20-64

installation of flowmeters, 20-72

selection of flowmeters,

20-72–20-73

terminology, 20-62

two-phase flows, 20-71–20-72

types of flowmeters

coriolis, 20-71

differential pressure,

20-64–20-66

electromagnetic, 20-69

positive displacement,

20-66–20-67

turbine (or vane), 20-67–20-68

ultrasonic, 20-69–20-71

variable area, 20-66

vortex shedding, 20-68–20-69

Flow-rate regulator valves, 21-73

Flow sensors, 17-5–17-6,

20-148–20-151

Flow source, defined, 9-9

Fluid actuation system, 21-64–21-66

Fluid power system, control

E/H system feedforward-

plus-PID control, 10-10

E/H system generic fuzzy

control, 10-11–10-12

steady-state characteristics,

10-8–10-9

system dynamic characteristics,

10-9–10-10

Foil effect, 20-113

Force constant, 21-8

Force-current analogy

beyond one-dimensional

mechanical systems, 16-3

drawbacks, 16-2

intuitions in processes,

16-3–16-4

measurement as a basis, 16-3

Force feedback accelerometers,

20-33

Forced mass–spring system, 20-15

Force measurement

general considerations, 20-34

Hooke's law, 20-34–20-36

Forces, produced by field distributions

around electric charge,

7-11

Force sensing resistors (FSRs), 20-44

Force sensors, 5-8, 20-36–20-47

Force/torque sensors, 17-5

Ford Motor Company, 1-3

Forward biased region, 21-15

Four-stroke internal combustion

engine, 12-28

Frequency-domain techniques, 1-5

Friction values, for different

surfaces, 9-11

Function block diagram (FBD), 4-6

Gas bulb thermometer, 20-75

Gauging applications, 20-158–20-159

Gear pumps, 21-67

Geometric matching,

20-164–20-166

Geometric scaling factor, 5-2

Gibb’s thin film free energy density,

21-116

Global positioning system (GPS),

-16

GPS-based continuous traffic model,

1-9–1-10

GRAFCET, 4-6

Gray code, 20-6

Grayscale image, 20-154

Gyrator, 9-15

Gyroscopes, 5-8–5-9

Hall-effect sensor, 1-8, 20-111

Hall effect switches, 20-9–20-10,

20-111

Handshaking, 3-10

Harmonic drive type electrostatic

motor, 5-4

Harvard architecture, 4-3

H-bridge configuration, 21-30

HC12 microcontroller input–output

subsystems, 3-10

9258.index.fm Page 3 Thursday, October 4, 2007 9:27 PM

I-4 Index

Heating/cooling system for homes and

offices, 3-2–3-3

Heat sinks, 21-15

HF radio signals, 18-15

High-pass filters, 3-7

High-volume precision

manufacturing, 1-6

Horizontal representation, 6-4

Human computer interface (HCI),

3-3

Hydraulic and pneumatic actuation

systems

fluid actuation system, 21-64–21-66

hydraulic actuation system,

21-66–21-78

scheme of a hydraulic servo system

for position control,

21-79–21-84

Hydraulic and pneumatic actuators,

17-15

Hydraulic control valves, 10-4–10-5

principle of valve control,

-3–

-4

Hydraulic cylinder, 10-7

Hydraulic fluids, properties

bulk modulus, 10-3

density, 10-2

viscosity, 10-2–10-3

Hydraulic pumps

principle of pump operation,

10-5–10-6

pump controls and systems, 10-6

IC decoder chips, 20-5

Ideal capacitor, 11-21–11-24

Ideal gas model, 12-19–12-22

Ideal inductor, 11-25–11-27

Identity, of mechatronics, 6-2–6-3

Ignition system, electronic, 1-8

Image file, 20-154–20-155

Image formation, 20-127–20-129

Image sensors, 20-129–20-134

Impedance, 11-32–11-36

functions in mechanical system,

9-17–9-19

Inclinometer, 20-8

Incremental angular optical encoders,

20-108

Incremental encoder, 20-5

Index signal, 20-5

Induction motor

braking method, 21-44

brushless DC motor, 21-49–21-50

DC permanent magnet (PM)

motor, 21-47

single-phase, 21-46–21-47

speed control, 21-44–21-46

starting of, 21-44

stepper motor, 21-47–21-49

torque–slip characteristic, 21-43

Inductive method, 20-41–20-42

Inductive proximity switches, 20-112

Inductor kickback, 21-32

Inertial accelerometers,

20-19–20-23

Inference mechanism, 2-9

Infinitestimal rotations, 9-31

Information flow, 2-3

Information processing systems

intelligent control systems, 2-8–2-9

model-based and adaptive control

systems, 2-7

multilevel control architecture,

2-6–2-7

special signal processing, 2-7

supervision and fault detection, 2-8

Information technology, 2-1

Information technology and

mechatronics, 1-2

Infrared photodetectors, 20-3

Infrared sensitive device, 20-3–20-6

Infrared type sensors, 17-6

Input signals, to mechatronic systems

analog-to-digital converters, 3-5

transducer/sensor input, 3-3

Insulated Gate Bipolar Transistor

(IGBT), 21-26

Intake stroke, 12-28

Integrated circuit temperature sensors,

20-83–20-84

Integrated microsensors

definition, 20-136–20-137

fabrication process, 20-137–20-138

principles in, 20-138–20-151

Intel Corporation microprocessor, 1-7

Intelligent control systems, 2-8–2-9

Intelligent mechatronic systems, 2-9

Intelligent safety systems, 1-7

International Practical Temperature

Scale of 1990 (ITS

), 20-74

Internet, 4-3

Interrupt enable (IE), 3-9

Interrupt request (IRQ), 3-9

Inventions, in mechatronics, 1-3

Isentropic efficiency, 12-27

ISO Open Systems Interconnection

(OSI) model, 3-10

Isotropic etching, 15-6

Japan Society for the Promotion of

Machine Industry (JSPMI),

1-7

Joint photographic experts group

format (JPEG), 20-155

1-junction, 9-6

Junction photodetectors,

20-124–20-127

Kinematic pairs, 21-61

Kinetic energy storage, 9-14–9-15

Kirchhoff ’s voltage law, 9-6, 9-20,

15-15, 21-106

Knowledge base, 2-9

LabVIEW Simulation Module,

13-5–13-6

LabVIEWState Diagram Toolkit,

13-5–13-6

Lagrange’s equations, 7-6

case of nonholonomic constraints,

9-49–9-50

classical approach, 9-48–9-49

for electromechanical systems,

7-10–7-12

in formulation of subsystem

models, 9-51–9-53

models of mechanical systems,

9-50–9-51

of motion for electromechanical

systems, 7-15–7-17

nonconservative effects, 9-49

Landay–Lifschitz–Gilbert equations,

21-116

Laplace operator, 9-17

Laser interferometers, 20-12

Latching current, 21-18

Lead-zirconate-titinate (PZT),

21-11

Leaks, in hydraulic system, 21-80

Legitimacy, of mechatronics,

6-3–6-4

Lens focal length, 20-156–20-157

Lenz’s law, 15-13

LF radio signals, 18-15–18-16

LIGA and LIGA-like technologies,

15-7–15-8

Light detectors

basic radiometry, 20-119–20-121

image formation, 20-127–20-129

image sensors, 20-129–20-134

light sources, 20-121–20-122

photon detectors, 20-123–20-127

pyroelectric detectors, 20-123

Light polarizing filters, 20-3

Light sensors, 17-6–17-7

Limit switch, 20-2

Linear and rotational position sensors,

17-2–17-4

Linear and rotational sensors

AC inductive sensor, 20-9

capacitive sensors, 20-8

DC magnetic sensors, 20-9–20-11

infrared sensitive device, 20-3–20-6

laser interferometers, 20-12

magnetostrictive wire transducers

(MTS), 20-11–20-12

resistors, 20-7–20-8

switches, 20-2

tilt sensor, 20-8

ultrasonic (US) sensors, 20-11

Linear hydraulic motors,

21-70–21-71

Linearized model, of an hydraulic

servosystem with position

control, 21-82

Linear optical encoders, 20-109

9258.index.fm Page 4 Thursday, October 4, 2007 9:27 PM

Index I-5

Linear variable differential transformer

(LVDT), 20-9,

20-109–20-110

Liquid-glass thermometer, 20-76

Local area network (LAN), 4-3

Logical values, 4-1

Logic analyzer, 3-13

Lorentz equation, 5-2, 5-5

Lorentz’s law, of electromagnetic

forces, 21-3–21-4

Lorentz-type nonrotary actuators, 5-6

Low-pass filters, 3-7

Lumped parameter processes,

theoretical modeling of,

-11

MAGIC, 14-5, 14-8

Magnetic stress tensor, 7-13

Magnetization dynamics, of thin films,

21-116

Magnetoelastic force transducers,

20-45

Magnetoresistive force sensors, 20-44

Magnetostrictive sensors, 17-7

Magnetostrictive wire transducers

(MTS), 20-11–20-12

Manufacturing automation protocol

(MAP), 3-10

Mass conservation law, 8-3

Master-Slave pooling method, 4-7

Mathematical model

MEMS

elementary synchronous reluctance

micromotor, 15-16–15-18

translational microtransducer,

15-14–15-16

two-phase permanent-magnet

stepper micromotors,

15-18–15-20

two-phase permanent-magnet

synchronous micromotors,

15-20–15-22

lumped-parameter mechanical

systems

bond graph approach, 9-24–9-26

classical approach, 9-23–9-24

Matlab simulations, 14-12

MATLAB/SIMULINK, 2-10

MATRIX-X, 2-10

Maxwell, J- C-, 1-3

Maxwell–Faraday equations, of

electromagnetics, 7-2

Maxwell’s force-voltage analogy

dependence on reference frames,

16-5

intuitions in processes,

16-4–16-5

systems of particles, 16-4

Maxwell’s equations, 8-5, 15-9–15-11

Maxwell stress tensor method, 15-10

Mean effective pressure (mep),

12-28–12-29

Mechanical control systems, 1-7–1-8

Mechanical systems, 2-1

Mechanics, laws of

electric phenomena, 8-5–8-6

equations of motion of deformable

bodies, 8-2–8-4

statics and dynamics of mechatronic

systems, 8-1–8-2

Mechatronics

classification of products, 1-7

communication of, 6-5

curriculum development of,

6-5–6-7

definitions, 1-1–1-2, 2-1–2-3

educational programmes, 1-2

evolution of, 1-7–1-10

evolution of the subject of, 6-7–6-9

historical perspective, 1-3–1-7

identity of, 6-2–6-3

inventions, 1-3

journals, 6-2

key elements of, 1-2–1-4

legitimacy of, 6-3–6-4

in modern times, 1-10–1-11

selection of, 6-4–6-5

Mechatronic systems

antilock braking system (ABS), 3-3

common structures in, 8-6–8-8

computer aided development of,

2-9–2-10

control prototyping, 2-14–2-15

definitions, 2-1–2-3

design steps, 2-9

functions of, 2-3–2-5

heating/cooling system for homes

and offices, 3-2–3-3

historical development of, 2-1–2-3

input signals of, 3-3–3-5

integration of, 2-5–2-6

mechanical system modeling in,

9-2–9-8

difficulties in the mathematical

model development,

9-27–9-28

energy methods, 9-28–9-30

Lagrange’s equations, 9-50–9-51

mechanical components in

mechatronic systems,

9-8–9-19

physical laws in model

formulation, 9-19–9-27

microprocessor control, 3-8

input–output, 3-9–3-11

numerical, 3-8–3-9

modeling procedure, 2-10–2-12

output signals of, 3-5–3-6

real-time simulation, 2-12–2-14

rigid body multidimensional

dynamics

coordinate transformations,

9-46–9-47

dynamic properties, 9-39–9-43

equations of motion,

9-43–9-45

graph formulation, 9-45–9-46

signal conditioning, 3-6–3-7

kinematics, 9-31–9-39

software control, 3-11–3-12

statics and dynamics of, 8-1–8-2

testing and instrumentation,

3-12–3-13

vs conventional design systems, 2-5

MEMCAD, 14-13

MEMS accelerometers, 17-9–17-10

MemsPro, 14-13

Mercury switch, 20-8

Mesh current method, 11-16–11-17

Metal-Oxide-Semiconductor Field

Effect Transistor

(MOSFET), 21-23–21-26

Microaccelerometers

signal-conditioning

circuitry, 20-33

Microactuator technology

electromagnetic actuation,

5-5–5-6

electrostatic actuation, 5-3–5-5

Micro and nanoactuators, 17-18

Micro and nanosensors, 17-8

Microcomputers, 2-4

Microcontroller firmware, 4-5

Microcontroller network systems,

3-10

Microcontrollers, 4-4–4-5

Microelectromechanical systems

(MEMS), 1-9, 5-1

analysis and modeling of the

microtransducer,

21-102–21-104

control of

constrained control of nonlinear

MEMS, 15-26–15-29

constrained control of nonlinear

uncertain MEMS,

15-29–15-34

by the proportional-integral-

derivative (PID) controllers,

15-23

soft-switching sliding mode

control, 15-25–15-26

time-optimal controller, 15-25

tracking control, 15-23–15-25

design and fabrication,

21-98–21-102

design of motion microdevices,

15-3–15-6

electromagnetic fundamentals and

modeling, 15-8–15-11

fabrication of

bulk micromachining, 15-6

surface micromachining,

15-6–15-7

use of LIGA and LIGA-like

technologies, 15-7–15-8

mathematical models,

15-11–15-22

modeling and simulation of

analog and mixed-signal circuit

development, 14-7–14-8

9258.index.fm Page 5 Thursday, October 4, 2007 9:27 PM

I-6 Index

Microelectromechanical systems

(MEMS) (Continued)

digital circuit development,

14-2–14-7

digital vs analog circuits,

14-13–14-15

guidelines for successful, 14-15

resources, 14-10–14-13

techniques and tools,

14-8–14-13

Microelectronics, 4-1

Microfabrication, of electromechanical

microstructures and

microtransducers

electrodeposition of metals,

21-110–21-111

NiFeMo and NiCo thin films

electrodeposition,

21-114–21-115

NiFe thin films electrodeposition,

21-111–21-114

using micromachined permanent

magnet thin films,

21-115–21-116

Micromachined polycrystalline silicon

carbide micromotors,

21-130–21-132

Micromanipulation tool, 1-11

Micromirror actuator,

21-116–21-130

Micro/nanoaccelerometers,

20-30–20-31

Microprocessor control, of

mechatronic systems,

3-8

input–output, 3-9–3-11

numerical, 3-8–3-9

Microprocessor control system, 3-2

Microprocessors, 4-4–4-5

Microsensor technology, 5-2

force sensors, 5-8

gyroscopes, 5-8–5-9

pressure sensors, 5-7

silicon microfabricated

accelerometer, 5-8

strain measurements, 5-7

Microswitch, 20-2

Microwave proximity sensors,

20-114–20-115

Millimeter-wave radar technology, 1-9

MOBILE, 2-9

Model-based fault detection, 2-8

Modeling, of a physical system

bond graph, 2-11

difficulties in the mathematical

model development,

9-27–9-28

elastic system, 7-8–7-10

energy methods, 9-28–9-30

of hydraulic servosystem for

position control,

21-79–21-84

Lagrange’s equations, 9-50–9-51

lumped parameter processes, 2-11

mechatronic system

concept of causality, 9-7–9-8

interconnection of components,

9-6–9-7

mechanical components,

9-8–9-19

physical variables, 9-3–9-5

power variables, 9-3–9-5

of MEMS, 15-11–15-22

analog and mixed-signal circuit

development, 14-7–14-8

digital circuit development,

14-2–14-7

digital vs analog circuits,

14-13–14-15

guidelines for successful, 14-15

microtransducer, 21-102–21-104

resources, 14-10–14-13

techniques and tools,

14-8–14-13

objected-oriented, 2-11

physical laws in model

formulation, 9-19–9-27

pneumatic actuation system,

21-91–21-96

MOS field effect transistor (MOSFET),

14-3–14-4, 14-7, 20-134

Motion actuators, 21-69–21-71

Motion and play, equations of, 8-2

Motions of points, in the body, 9-31

relative to coordinate systems,

9-32–9-33

Motion transducers, 11-24

Multicomponent dynamometers,

20-42

Multilayer standard protocols, 4-6

Multi-turn pot, 20-7

Multi-walled carbon nanotubes

(MWNTs), 5-10

Nanomachines, 5-9–5-11

Nanotechnology, 5-1

National instruments internal image

file format (AIPD),

20-155

Navier–Stokes equations, of fluid

mechanics, 7-2

NBC sensors, 17-7

NEWEUL, 7-6

Newton–Euler equation, 7-4–7-6

Newton's laws of motion,

-10–

-11,

-21,

-145,

-121

NiFeMo and NiCo thin films

electrodeposition,

21-114–21-115

NiFe thin films electrodeposition,

21-111–21-114

NODAS v 1-4, 14-13–14-15

Node voltage analysis, 11-15–11-16

Noncontact ranging sensors

frequency modulation techniques,

20-97–20-99

magnetic position measurement

systems, 20-106–20-107

other distance measuring methods,

20-107–20-110

phase measurements, 20-94–20-97

structured light methods,

20-105–20-106

triangulation ranging method,

20-99–20-105

using microwave technology, 20-94

using time-of-flight or frequency

modulation methods,

20-89–20-94

Noncontact thermometers,

20-84–20-85

Nonholonomic constraints,

9-49–9-50

Nonlinear circuit elements,

11-20–11-21

Nonstationary random vibrations,

20-17

Norton equivalent circuits

computation of the Norton

equivalent current, 11-19

determination of resistance, 11-18

experimental determination

Norton equivalents,

11-19–11-20

Norton theorem, 11-18

N-tuple, 15-5

N-type semiconductors, 21-14

Nuclear sensors, 17-8

Numerically controlled (NC)

machines, 1-3

Numerical simulation, of dynamic

systems

common simulation blocks

continuous linear system blocks,

-2

discrete linear system blocks, 13-2

nonlinear system blocks, 13-2

and signal generation, 13-3

table lookup blocks, 13-2

hybrid control approach, 13-6

ordinary differential equation

(ODE) solvers, 13-4

textual equations within block

diagrams, 13-3–13-4

timing options, 13-4

visualization, 13-5–13-6

Nyquist, H-, 1-3

Nyquist theorem, 3-6

Object-oriented modeling, 2-11

Online expert system, 2-8

On–off valves, 21-72

Open-collector output, 21-32

Open-ended electromagnetic

system, 15-3

Open loop transfer function, 21-83

Optical encoders, 20-5–20-6

Optical proximity sensors,

20-115–20-116

9258.index.fm Page 6 Thursday, October 4, 2007 9:27 PM

Index I-7

Optocouplers, 21-32–21-33

Optoisolators, 21-32–21-33

Ordinary differential equations

(ODEs), 7-2, 13-4

Orthonol, 21-113

OTP (One Time Programmable)

EPROM/ ROM, 4-5

Otto cycle, 12-29–12-31

Output signals, to mechatronic

systems

actuator output, 3-6

digital-to-analog converters, 3-5

Parallel mode traffic, 3-10

Partial differential equations

(PDEs), 7-2

Pascal, 1-3

Pattern-matching, 20-162–20-164

Paynter’s reticulated equation, of

energy continuity, 9-3

Periodic signals, 11-28

Periodic vibrations, 20-15–20-17

Permalloy thin films,

21-113–21-114

Permanent-magnet DC (PMDC)

motor, 9-4

Permanent-magnet polymer

magnets, 21-115

Permeability constant, 21-3

Permittivity, of air, 11-24

Perspective errors, 20-157

Phasors, 11-32–11-36

Phasors and impedance,

11-32–11-36

Photocell, 20-3

Photodetectors

infrared, 20-3

junction, 20-124–20-127

Photodiode, 20-3

Photodiode capacitance, 20-134

Photoemitter, 20-3

Photointerrupter, 20-3–20-4

Photon detectors, 20-123–20-127

Photoreflector, 20-3–20-4

Photoresistor, 20-3, 20-124

Phototransistor, 20-3

PID control, 3-8

Piezoelastic beam, 7-9–7-10

Piezoelectric accelerometers,

20-24–20-25,

20-31–20-33

Piezoelectric actuators

application areas, 21-57–21-58

constitutive equations of piezoelec-

tric materials, 21-51–21-52

motors with several degrees of free-

dom, 21-61–21-63

piezoactuating elements,

21-53–21-57

piezoelectric effect, 21-51

piezoelectric materials, 21-53

ultrasonic motors, 21-58–21-61

Piezoelectric effect, 20-40, 20-42

Piezoelectric elements, 20-40

Piezoelectric sensing,

20-139–20-140

Piezoresistive accelerometers,

20-25–20-26

Piezoresistive sensor, 20-139

Piezoresistive strain gages, 5-7

Piezoresistive transducers, 20-33

Piezotransistors, 20-42

Piston, dynamic equilibrium equation

of, 21-80

Planar microwindings, 21-129–21-130

Pneumatica, 1-3

Pneumatic actuation system

modeling of a, 21-91–21-96

types of compressors, 21-85–21-87

valves in, 21-87–21-91

Pneumatic control elements, 1-3

Pn junction, 21-14

Poles and throws, of switch, 20-2

Polytropic process, 12-24–12-25

Polyvinylidence fluoride (PVDF),

-11

Polzunov, 1-3

Portable network graphics (PNG),

20-155

Position sensitive detectors (PSDs),

20-4

Positive displacement flowmeters,

20-66–20-67

Possibilistic methods, 2-9

Potentiometers, 20-7, 20-109

Power amplification, 21-13

Power and energy variables, for

mechanical systems, 9-3

Power bond, 9-4

Power dissipation, 21-23

Pressure regulator valves, 21-72–21-73

Pressure sensors, 5-7

Problem-based learning (PBL), 6-4

Programmable electrohydraulic valves,

10-12–10-13

Programmable logic controller (PLC),

3-8, 4-5–4-6

Proportional valves, 21-77

Proximity sensors, 17-6,

20-110–20-116

P-type semiconductors, 21-14

Pull-down voltage, 14-9

“Pull-in” voltage, 14-9

Pulse-width modulation (PWM), 3-10,

21-30–21-31

Push-pull (class B) power amplifier,

21-29–21-30

Pyroelectric detectors, 20-123

Quartz crystal oscillators,

18-10–18-12

Radial flux microdevices, 15-5

Rankine cycle, 12-25–12-26

Rankine cycle steam turbine, 12-27

Rapid prototyping, 14-6

Real-time counter (RTC), 4-5

Real-time simulation, in design of

mechatronic systems,

2-12–2-14

Reciprocal piezoelectric effect, 21-11

Rectilinear acceleration, 20-14

Registers, 3-8

Relative permeability, 21-3

Resistance and ohm's law

common resistor values, 11-7

open and short circuits, 11-8–11-10

parallel resistors and current divider

rule, 11-11

resistance strain gauge, 11-8

series resistors and the voltage

divider rule, 11-10–11-11

Wheatstone bridge, 11-11–11-12

Resistance temperature devices,

20-80–20-82

Resistive method, 20-41

Resistors, 20-7–20-8

Resolvers, 20-9

Retroreflective sensors, 20-115

Reverse biased region, 21-15

Reverse-recovery time, 21-16

Rheostat, 20-7

Ribbens, William, 3-7

Rigid body models

constraints and generalized

coordinates, 7-2–7-4

equations of dynamics of, 7-4–7-6

kinematics of, 7-2

kinematic vs dynamics problems,

7-4

Rigid body multidimensional

dynamics

coordinate transformations,

9-46–9-47

dynamic properties, 9-39–9-43

angular momentum, 9-41–9-42

inertia, 9-39–9-41

kinetic energy, 9-41–9-43

equations of motion, 9-43–9-45

graph formulation, 9-45–9-46

kinematics, 9-31–9-39

Ring-type load cells, 20-39–20-40

RISC (Reduced Instruction Set), 4-4

Robot’s eye, 21-62

Robust control theory, 1-7

Rotary electrostatic actuators, 5-4

Rotary vane pumps, 21-67–21-68

RS-232C serial line, 4-5

Rubidium oscillators, 18-12

Saturation region, 21-21

Saturation voltage, 21-21

Scaling, physics of, 5-1–5-2

Scanning probe microscope (SPM)

assemblers, 5-11, 8-6

Scanning thermal microscopy (SThM),

20-86

9258.index.fm Page 7 Thursday, October 4, 2007 9:27 PM