354 8 Process Design and Process Monitoring
8.2.1 Sensors for Process Monitoring
A number of sensors are available on the market for monitoring manufacturing
processes, of which most can be classified in six physical functional principles.
Table 8.2 shows an allocation of typical measurement parameters and the physical
functional principles that primarily underlie them.
In order to standardize usage and to lend semantic clarity to the terms used, the
essential fundamental concepts of metrology will first be defined [Pfei01]:
• The measurement parameter is the physical parameter that is to be
measured.
• Measurement is the execution of activities planned for the quantitative compari-
son of measurement parameters with the unit.
• The measurement result is the value taken from the measurements estimated as
the true value of a measurement parameter.
• The measurement principle is the physical basis of the measurement.
• The measurement method is defined as a special kind of procedure used in the
measurement independent of the measurement principle.
• A measurement process is the practical application of a measurement principle
and a measurement method.
A further distinction is drawn between direct and indirect measurement meth-
ods. Direct measurement methods record the measurement parameter of interest
by means of a comparison with a normal of the same physical parameter. Indirect
measurement methods, in order to determine the measurement parameter, capture
an auxiliary parameter which stands in a known and describable relation to the
measurement parameter [Pfei01].
While for direct methods, it is often difficult to reach the measurement loca-
tion with suitable sensors, the problem with indirect measurement methods is in the
determination of an assignment rule, the validity of which should not be affected
Table 8.2 Relation of measurement parameters to physical functional principles
Physical functional principles
for process description Associated measurement parameters
Mechanical (motion, displacement, stiffness) Position, acceleration, velocity, force, torque,
longitudinal/torsional stress,
longitudinal/torsional strain, pressure etc.
Thermal (kinetic energy of atoms and
molecules)
Temperature, heat flow, specific heat, thermal
conductivity etc.
Electric (electric field) Voltage, current, charge, conductivity etc.
Magnetic (magnetic field) Permeability, magnetic current etc.
Radiation (electromagnetic radiation) Energy, intensity, emission, reflection,
permeability etc.
Chemical (forces between atomic nuclei and
electrons, bond energies of molecules)
Chemical components, concentrations etc.