(V-grooves produced by anisotropic etching in Si[100]) [71]. Salamo and coworkers [72] have used
MBE on high-index GaAs surfaces to promote the assembly of (In, Ga)As NWs and other nanos-
tructures during deposition. Following the growth or deposition into templates, selective etchants
can be used to isolate NWs. Among the advantages for this method is straightforward alignment of
NWs using template material having columnar pores, and the wide flexibility in deposition meth-
ods, including metal-catalyzed growth, catalyst-free growth from the vapor or liquid phases, elec-
trochemical methods, and solution-gelation (sol-gel). In addition, NW diameter is controlled by the
template-pore diameter. A principal disadvantage, however, is that the NWs produced using tem-
plate-assisted growth (TAG) are frequently not single crystalline. Moreover, the lower limit of
diameter of NWs is governed by the template-pore diameter, and some of the hierarchal structures
that can be produced via MCG may not be as easily prepared using TAG. In addition, aspect ratios
of TAG may be limited by mass transport. Among templates, two types of nanoporous-membrane
templates are frequently used: anodic aluminum oxide, (AAO) [73–76] and porous-polymer films
[77]. Pathways for the production of inorganic NWs include CNTs [78] and zeolites [79]. To pro-
duce AAO templates, aluminum films are electrochemically oxidized, and local etching takes place
producing pores that have local hexagonally close-packed ordering. Subsequent anodization of the
film leads to columnar pores with relatively monodisperse diameters ranging from 5 nm to ⬎100
nm, depending upon preparation conditions, e.g., electrolyte composition and concentration, and
anodization voltage. Such template materials (e.g., Anodisc™) can be obtained commercially via
Whatman™ or prepared. Shingubara [80] has presented a review of the use of AAO templates for
the preparation of nanomaterials. Polymer films having track-etched channels are formed by irra-
diation of heavy ions from nuclear fissions [81]. In many cases, following deposition, the NWs can
be isolated by selective etching of the template; often an appropriately selected acidic solution pro-
vides the necessary selective etching. A diverse number of materials, including metals, semicon-
ductors, and binary oxides have been deposited in templates via vapor phase, electrochemical
means, or sol-gel methods.
Lew et al. [82], Lew and Redwing [83], and Redwing et al. [33] demonstrated that high-qual-
ity, single-crystalline Si and SiGe NWs can be produced using AAO templates with a metal cata-
lyst. In contrast to template-free MCG, in this case, the NW diameter is controlled by the template
diameter. This process has several notworthy features: it provides one possible route for growth-
aligned NWs; it enables investigation of growth mechanisms and kinetics in the absence of catalyst-
particle size-driven considerations. The demonstration of SiGe NW growth suggests the possibility
of producing more complex NW materials and compositions, such as Si
x
Ge
1⫺x
NWs, whose com-
position is controlled. Template-based methods have not been limited to AAO and polymer-based
templates: for example, Han et al. [78] used CNTs as templates to facilitate the syntheses of single-
crystalline GaN and Si
3
N
4
NWs.
Al-Mawlawi and coworkers [84] demonstrated synthesis of CdS NW arrays via electrodeposi-
tion using AAO. Electrochemical methods typically yield NWs, which are polycrystalline and not
single crystalline; for many applications, however template-assisted electrochemical deposition
offers a rather easy route for synthesizing 1-D structures. Often limitations due to mass transport —
well understood from the electrodeposition through or in vias in top-down semiconductor device
processing — can be ameliorated by use of pulsed or alternating current (AC) electrodeposition
techniques. In selected cases, high-quality and even single-crystalline NWs have been produced
using this technique. Another attractive (though not exclusive) feature of electrodeposition is that
multiple species can be reduced and deposited at selected over potentials, enabling the formation of
compositionally segmented NWs within a single electrochemical bath.
For several decades, sol-gel methods [85] have represented an attractive, low-cost method for
producing both planar and nonplanar-thin films of a diverse number of materials, including binary,
ternary, and quaternary oxides, and binary semiconductors. For more than a decade, sol-gel methods
have been used with nanoporous templates to produce 1-D nanostructures, both NWs and NTs. In
nearly all cases, these nanostructures are polycrystalline in nature with varying degrees of control of
210 Nanotubes and Nanofibers