xviii Modeling and Control of Vibration in Mechanical Systems
7.25 Sensitivity function. . . . . . . . . . . . . . . . . . . . . . . . . . . 156
7.26 Sensitivity function of the dual-stage system. . . . . . . . . . . . . 157
7.27 Frequency responses of P
v
(z)C
v
(z) (solid curve) and P
m
(z)C
m
(z)
(dashed curve). . . . . . . . . . . . . . . . . . . . . . . . . . . . . 157
7.28 Sensitivity function of the dual-stage system. . . . . . . . . . . . . 159
7.29 Open loop frequency responses of the dual-stage system. . . . . . . 159
7.30 Step r esponse of the dual-stage system. . . . . . . . . . . . . . . . 160
7.31 3σ value of PES NRRO versus frequency. . . . . . . . . . . . . . . 160
8.1 Q parameterization fo r control desig n. . . . . . . . . . . . . . . . . 163
8.2 Peak filter F in t he nominal feedback loop. . . . . . . . . . . . . . 167
8.3 Peak filter in the frequency domain. . . . . . . . . . . . . . . . . . 167
8.4 Sensitivity functions befor e and aft er group peak filtering activated. 170
8.5 PZT microactuator attached to VCM actuato r arm. . . . . . . . . . 170
8.6 Power spectrum of the position error before servo control. . . . . . 171
8.7 PZT micro actuator frequency response. . . . . . . . . . . . . . . . 172
8.8 Sensitivity functions befor e and aft er the K YP lemma-based design:
simulation result. . . . . . . . . . . . . . . . . . . . . . . . . . . . 174
8.9 Open-loop Bode plot befor e and aft er the KY P lemma-based design. 175
8.10 Structure of experimental setup. . . . . . . . . . . . . . . . . . . . 175
8.11 Sensitivity functions before and after the KYP lemma-based design:
experimental r esults. . . . . . . . . . . . . . . . . . . . . . . . . . 176
8.12 σ value of PES versus frequ ency. . . . . . . . . . . . . . . . . . . . 176
8.13 Frequency response of the PZT microactuator. . . . . . . . . . . . . 179
8.14 PES NRRO power spectrum calculated from measured PES signal
without servo control, reflecting the vibratio n distribution of the sys-
tem (3σ = 21 nm including the noise 3σ = 15 .2 nm). . . . . . . . . 180
8.15 Comparison of sensitivity functions. . . . . . . . . . . . . . . . . . 181
8.16 Open loop frequency responses (PLPF (GM: 6 dB, PM: 50 deg.,
Bandwidth 1.4kHz)); KYP(GM: 6 dB, PM: 34 deg., Bandwidth: 1.7
kHz))). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 181
8.17 NR RO power sp ectrum with PLPF and KYP (50% reduction before
1 kHz). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182
9.1 H
2
control scheme with Q parametrization for controller design. . . 184
9.2 Frequency response of a PZT mi croactuator. . . . . . . . . . . . . . 190
9.3 Open-loop frequency responses. . . . . . . . . . . . . . . . . . . . 191
9.4 Designed sensitivity functions. . . . . . . . . . . . . . . . . . . . . 192
9.5 Comparison of sensitivity functions obtained from experi ment. . . . 192
9.6 NRRO power spectrum with KYP Lemma-based controller with and
without H
2
minimization. . . . . . . . . . . . . . . . . . . . . . . 1 93
9.7 PES NRRO spectrum without servo control. . . . . . . . . . . . . . 194
9.8 Open-loop frequency response. . . . . . . . . . . . . . . . . . . . . 195
9.9 Resultant sensitivity function (Solid line: with Spec. (i), (ii) and (iii);
Dashed line: wi th Spec. (i) and (ii)). . . . . . . . . . . . . . . . . . 195