Rotational and Translational Microelectromechanical Systems 15-35
quantitative analysis. In fact, using the cornerstone laws of electromagnetics and mechanics (e.g., Maxwell’s,
Kirchhoff and Newton equations), the differential equations to model electromagnetic and mechanical
phenomena and effects can be derived and applied to attain the performance analysis with outcome
prediction. Mathematical models for MEMS are found. Making use of these mathematical models,
analysis and optimization were performed, and nonlinear control algorithms were designed. The elec-
tromagnetics features and phenomena were integrated into the analysis, modeling, synthesis, and opti-
mization. It is shown that to meet the specified level of performance, novel high-performance MEMS
should be synthesized, high-fidelity modeling must be performed, advanced controllers have to be
synthesized, and highly detailed dynamic nonlinear simulations must be carried out. The results reported
have direct application to the analysis and design of high-performance MEMS. Different MEMS can be
devised, synthesized, defined, and designed, and a number of long-standing issues related to geometrical
variability and electromagnetics are studied. These benchmarking results allow one to reformulate and
refine extremely important problems in MEMS theory, and solve a number of very complex issues in
design and optimization with the ultimate goal to synthesize innovative high-performance, high torque,
and power densities MEMS.
References
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1986.
8. Guckel, H., Christenson, T. R., Skrobis, K. J., Klein, J., and Karnowsky, M., “Design and testing of
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