
Rotational and Translational Microelectromechanical Systems 15-29
The nonlinear bounded controller is given as
If matrices K
i
are diagonal, we have the following control algorithm:
15.6.6 Constrained Control of Nonlinear Uncertain MEMS: Lyapunov
Method
Over the horizon [t
0
, ∞) we consider the dynamics of MEMS modeled as
where t ∈⺢
≥0
is the time; x ∈X is the state-space vector; u ∈U is the vector of bounded control inputs;
r ∈R and y ∈Y are the measured reference and output vectors; z ∈Z and p ∈P are the parameter
uncertainties, functions z(·) and p(·) are Lebesgue measurable and known within bounds; Z and P are
the known nonempty compact sets; and F
z
(·), B
p
(·), and H(·) are the smooth mapping fields.
Let us formulate and solve the motion control problem by synthesizing robust controllers that guar-
antee stability and robust tracking. Our goal is to design control laws that robustly stabilize nonlinear
systems with uncertain parameters and drive the tracking error e(t) = r(t) − y(t), e ∈E robustly to the
compact set. For MEMS modeled by nonlinear differential equations with parameter variations, the
robust tracking of the measured output vector y ∈Y must be accomplished with respect to the measured
uniformly bounded reference input vector r ∈R.
The nominal and uncertain dynamics are mapped by F(·), B(·), and Ξ(·). Hence, the system evolution
is described as
There exists a norm of Ξ(t, x, u, z, p), and ≤
ρ
(t, x), where
ρ
(·) is the continuous
Lebesgue measurable function. Our goal is to solve the motion control problem, and tracking controllers
must be synthesized using the tracking error vector and the state variables. Furthermore, to guarantee
robustness and to expand stability margins, to improve dynamic performance, and to meet other require-
ments, nonqudratic Lyapunov functions V(t, e, x) will be used in stability analysis and design of robust
tracking control laws.
u Φ GB x()
T
diag xt()
i−
γ
2
γ
+1
----- --- ----
K
i
t()xt()
i+
γ
+1
2
γ
+1
------ ---- -----
i=0
η
– ,=
diag xt()
i−
γ
2
γ
+1
----- --- ----
x
1
i−
γ
2
γ
+1
----- --- ----
0 00
0 x
2
i−
γ
2
γ
+1
---- ---- ----
00
00 x
c−1
i−
γ
2
γ
+1
----- ---- ---
0
00
0 x
c
i−
γ
2
γ
+1
----- --- ----
=
u Φ GB x()
T
K
i
x
2i+1
2
γ
+1
---- --- -----
i=0
η
–=
x· t() F
z
t, x, r, z()B
p
t, x, p()u, y+ Hx(), u
min
uu
max
, xt
0
()≤≤ x
0
===
x· t() Ft, x, r()Bt, x()u Ξ t, x, u, z, p(), y++ Hx(),==u
min
uu
max
≤≤ , xt
0
() x
0
=
Ξ t, x, u,z, p()
9258_C015.fm Page 29 Tuesday, October 2, 2007 3:35 AM