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Acoustic Microscopy
Lawrence W. Kessler, Sonoscan, Inc.
Introduction
ACOUSTIC MICROSCOPY is the general term applied to high-resolution, high-frequency ultrasonic inspection
techniques that produce images of features beneath the surface of a sample. Because ultrasonic energy requires continuity
of materials to propagate, internal defects such as voids, inclusions, delaminations, and cracks interfere with the
transmission and/or reflection of ultrasound signals. Compared to conventional ultrasound imaging techniques, which
operate in the 1 to 10 MHz frequency range, acoustic microscopes operate up to and beyond 1 GHz, where the
wavelength is very short and the resolution correspondingly high. In the early stages of acoustic microscopy development,
it was envisioned that the highest frequencies would dominate the applications. However, because of the high-attenuation
properties of materials, the lower frequency range of 10 to 100 MHz is extensively used. Acoustic microscopy is
recognized as a valuable tool for nondestructive inspection and materials characterization. Acoustic microscopy
comprises three different methods:
• Scanning laser acoustic microscopy (SLAM), which was first discussed in the literature in 1970 (Ref 1)
• C-mode scanning acoustic microscopy (C-SAM), which is the improved version of the C-
instrumentation (Ref 2)
• Scanning acoustic microscopy (SAM), which was first discussed in the literature in 1974 (Ref 3)
Each of these methods has a specific range of utility, and most often the methods are noncompetitive with regard to
applications. That is, only one method will be best suited to a particular inspection problem.