3 ed. , Kluwer, 2003, 689p.
Introduction
The SEM and Its Modes of Operation
Electron Beam Specimen Interactions
Image Formation and Interpretation
Special Topics in Scanning Electron Microscopy
Generation of X Rays in the SEM Specimen
X-Ray Spectral Measurement: EDS and WDS
Qualitative X-Ray Analysis
Quantitative X-Ray Analysis: The Basics
Special Topics in Electron Beam X-Ray Microanalysis
Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers
Specimen Preparation of Polymer Materials
Ambient-Temperature Specimen Preparation of Biological Material
Low-Temperature Specimen Preparation
Procedures for Elimination of Charging in Nonconducting Specimens
Introduction
The SEM and Its Modes of Operation
Electron Beam Specimen Interactions
Image Formation and Interpretation
Special Topics in Scanning Electron Microscopy
Generation of X Rays in the SEM Specimen
X-Ray Spectral Measurement: EDS and WDS
Qualitative X-Ray Analysis
Quantitative X-Ray Analysis: The Basics
Special Topics in Electron Beam X-Ray Microanalysis
Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers
Specimen Preparation of Polymer Materials
Ambient-Temperature Specimen Preparation of Biological Material
Low-Temperature Specimen Preparation
Procedures for Elimination of Charging in Nonconducting Specimens