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Egerton R.F. Physical Principles of Electron Microscopy. An Introduction to TEM, SEM, and AEM
Springer, 2005, 202p.
Preface
An Introduction to Microscopy
Limitations of the Human Eye
The Light-Optical Microscope
The X-ray Microscope
The Transmission Electron Microscope
The Scanning Electron Microscope
Scanning Transmission Electron Microscope
Analytical Electron Microscopy
Scanning-Probe Microscopes
Electron Optics
PropertiesofanIdealImage
ImaginginLightOptics
ImagingwithElectrons
Focusing Properties of a Thin Magnetic Lens
Comparison of Magnetic and Electrostatic Lenses
DefectsofElectronLenses
The Transmission Electron Microscope
TheElectronGun
ElectronAcceleration
Condenser-Lens System
The Specimen Stage
TEM Imaging System
Vacuum System
TEM Specimens and Images
Kinematics of Scattering by an Atomic Nucleus
Electron-Electron Scattering
The Dynamics of Scattering
Scattering Contrast from Amorphous Specimens
Diffraction Contrast from Polycrystalline Specimens
Dark-Field Images
Electron-Diffraction Pattes
Diffraction Contrast within a Single Crystal
Phase Contrast in the TEM
TEM Specimen Preparation
The Scanning Electron Microscope
Operating Principle of the SEM
Penetration of Electrons into a Solid
Secondary-Electron Images
Backscattered-Electron Images
Other SEM Imaging Modes
SEM Operating Conditions
SEM Specimen Preparation
The Environmental SEM
Electron-Beam Lithography
Analytical Electron Microscopy
The Bohr Model of the Atom
X-ray Emission Spectroscopy
X-Ray Energy-Dispersive Spectroscopy
Quantitative Analysis in the TEM
Quantitative Analysis in the SEM
X-Ray Wavelength-Dispersive Spectroscopy
Comparison of XEDS and XWDS Analysis
Auger Electron Spectroscopy
Electron Energy-Loss Spectroscopy
Recent Developments
Scanning Transmission Electron Microscopy
Aberration Correction
Electron-Beam Monochromators
Electron Holography
Time-Resolved Microscopy
Appendix: Mathematical Derivations
The Schottky Effect
Impact Parameter in Rutherford Scattering
References
Index
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