Martin P.M. Handbook of Deposition Technologies for Films and Coatings, Third Edition: Science, Applications and Technology
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Index 911
polycrystalline films 594
sputtered films 290–294
Substrate
heating 684
inorganic coatings on 433
motion GLAD 630
potential 306
rotation
GLAD 629
JVD 886
Supercritical fluids as solvents
99
Superhard films 430–432, 695
examples 691
nanocomposite films 699
Superlattice
applications 17
layer structure of 7
Surface
bombardment 299
kinetics 343
morphology 351
processes
effect on microstructure
414
reaction 343
Surface barrier layers 131
Surface chemistry 131
Surface hardness 131
Surface modification processes
base coat 131, 397
in situ 132
surface morphology 131
surface morphology 131
Surface smoothing
by ion irradiation 618
Susceptor 334
T
ta-C coatings 514
Tantalum oxide
films 407
TEM 724
Temperature coefficient of
resistivity (TCR) 740
Templating
GLAD 645
Tensile
properties of metal and alloy
deposits 235
test 733
TFEL display 370, 374, 381
Thermal decomposition reaction
317
Thermionic arc mode 469
Thermionic emission 472
Thermo-field emission 473
Thermodynamics
CVD reactions 320
description of film growth
558
Thin film
advantages of 3
characterization of 718
growth
by PECVD 408
column 648
critical ion energies
410
early 574
GLAD 624
Stranski-Kastanow 583
mechanism 584–592
In/Si 587
Si/Ge 589
three dimensional 569
two dimensional 574
mechanical properties of 228
solar cell 17, 444
solid oxide fuel cell 18
tensile properties of 228
Through field geometry 491
Ti
TiAlN films 606
hard coatings 513
self-lubricating coatings
697
TiB
2
Self lubricating 698
TiC/DLC 697
TiN
growth 576–581
defect density 605
self-lubricating coatings 698
two-dimensional island
coalescence 581
Transition metal oxides 699
Transmission electron microscopy
(TEM) 826
lens aberration correction 830
AEM analytical electron
microscopy
EELS electron energy loss
spectroscopy 827–831
energy loss near edge
structure (ELNES)
830
extended electron energy
loss fine structure
(EXELFS) 830
chemical composition
830
electron sources 827
environmental transmission
electron microscope
(ETEM) 831
examples 833
HRTEM high resolution
transmission electron
microscopy 827
basic concept 829
example 836
misfit dislocations 836
sample preparation methods
831
STEM scanning transmission
electron microscopy 827,
828
strengths and limitations 837
transmission electron
microscope 826
Transparent conductive oxide 517
Transparent conductive thin film
16
Tribological coatings 449
corrosion resistance 694
lubricants 694
friction and wear 693
metal-based 450
nanocomposite 453, 689
Tungsten oxide 429
Tunnel field geometry 492
Two-dimensional island
coalescence 581
Surface engineering 6
U
Ultrabarrier coatings 548
Ultra-pure water 114
Ultrasonic cleaners 108–111
Ultra-thin films 371
Unfiltered cathodic arc
hard coatings 508
912 Index
Uniformity
of ALD coatings 367
V
Vacuum polymer deposition (VPD)
534
Vapor condensation 108
VOC 99
Voids 742
W
Wear resistance 699
Wet chemical etching 97
Wet reaction cleaning 101
Wick jet capillary feed source 892
Wirefeed to hot filament source 890
WS
2
/WC/DLC coatings 698
X
X-ray photoelectron spectroscopy
(XPS) 755
Auger process 756
data collection 757
depth profiling 758
overview 754
quantification 759
strengths and limitations 760
X-ray diffraction (XRD) 754
glancing-incidence 765
high resolution (HRXRD) 761
lattice parameters 763
texture and pole figures 763
X-ray reflectivity (XRR) 754
characterization of thin layers
765
strengths and limitations 768
topological roughness effects
766
Y
Yttria-stabilized zirconia films 430
Z
Zirconnia
yttria-stabilized 430