Hughes M.P., Hoettges K.F. (Eds.) Microengineering in Biotechnology
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SUBJECT INDEX
A
AC dielectric spectroscopy......................................166–167
AC-electrokinetic, applications.............................. 199–205
in cancer cells detection ............................................210
for dielectric properties determination ............. 165–166
forces, application .............................................151–152
See also Dielectrophoresis; Microfabrication
techniques
Adobe Illustrator, role ...................................................... 86
Algae, impedance spectroscopy and optical
measurement.........................................176–179
See also Single biological cells, impedance spectroscopy
and optical analysis
Analogue to digital converter (ADC) ............................234
Animal applications and wireless capsule device ............ 228
See also Wireless endoscopy
Application-specific integrated circuit ...........................228
ASIC, see Application-specific integrated circuit
Atmospheric pressure CVD (APCVD) ...........................28
B
Bacillus subtilis, 209
BCE, see Bovine capillary endothelial
BESOI, see Bonded and etched-back silicon-on-insulator
wafer
BiCMOS processes, usage.............................................. 139
Biological characterisation, dielectrophoresis......... 205–210
Bonded and etched-back silicon-on-insulator wafer...... 142
Bosch etching.................................................................... 39
Bovine capillary endothelial.............................................. 68
Buffered hydrofluoric (BHF) .....................................31–32
Buffered oxide etch (BOE)............................................... 31
C
Cancer cells
detection, AC-electrokinetic techniques..................210
separation technique ......................................... 213–216
See also Dielectrophoresis
Cancer studies, DEP .............................................. 210–213
Capillary electrochromatography......................................73
Capillary electrophoresis (CE) ...................................63, 73
Capillary wall, modification............................................ 129
See also Electroosmotic flow (EOF)
Capsule system design ............................................230–231
See also Wireless endoscopy
Catalytic sensors, role ..................................................... 232
CEC, see Capillary electrochromatography
Cell culture devices ..................................................... 66–68
Cell level discrimination .........................................150–152
Cells isolation and positioning, in microfluidic
channel..........................................................167
Cellular manipulation and analysis...................................66
cell culture devices ................................................66–68
cell lysis and electroporation................................. 69–70
flow cytometry in measurement............................70–72
separation and analysis, proteins and
DNA ......................................................... 73–74
sorting of cells .............................................................72
See also Microfluidics
Centre for Neural Communication Technology............ 142
Chemical etching..............................................................38
Chemical mechanical polishing........................................ 30
Chemical vapor deposition (CVD) ...................... 25, 28–29
Chemo-mechanical sensors, role .................................... 232
Chip fabrication process ......................................... 170–174
Clausius–Mossotti factor................................187, 188, 202
Clewin program, role........................................................86
CMOS, see Complementary metal-oxide-semiconductor
CMP, see Chemical mechanical polishing
Complementary metal-oxide-semiconductor................ 228,
231, 232, 234–236
Complex dielectric model............................................... 157
Computer-aided design (CAD) ......................................... 3
Conductometric sensors, usage.......................................234
Contact photolithography and transparency
masks......................................................... 86–88
See also Microstructures fabrication, by soft
lithography
Contact printers, advantage..............................................17
Contamination control, microfabrication
techniques ....................................................40–41
cleaning .......................................................................44
clean rooms ........................................................... 42–43
counting particles........................................................41
facilities .................................................................45–46
human behavior ....................................................43–44
metrology ..............................................................47–48
wafer handling ............................................................ 42
M.P. Hughes, K.F. Hoettges (eds.), Microengineering in Biotechnology, Methods in Molecular Biology 583,
DOI 10.1007/978-1-60327-106-6, ª Humana Press, a part of Springer Science+Business Media, LLC 2010
247
Contamination control (continued)
water...................................................................... 46–47
wipers .................................................................... 44–45
See also Microfabrication techniques
Coulomb’s law ................................................................ 201
Coulter method...............................................................153
Covalent bound polymers, in EOF suppression............. 130
Covalent coatings, in EOF..................................... 129–130
Cryogenic pump, characteristics....................................... 24
See also Microfabrication techniques
Cryptosporidium parvum ..................................................208
Cuff electrodes........................................................136–138
See also Microengineered neural probes
Cyclospora cayetanesis .......................................................209
D
Data-logging telemetry capsules, usage.......................... 228
DEA, see N,N-diethylacrylamide
Debye–Hu¨ckel linearization scheme .............................. 124
Deep reactive ion etcher (DRIE) ..................................... 37
DEP, see Dielectrophoresis
DEP field-flow fractionation (DEP-FFF)..................... 215
DEPIM, see Dielectrophoretic impedance measurement
Design rule check (DRC)...............................................238
Dielctrophoresis collection rate (DCR) .........................206
Dielectric properties determination........................ 162–165
AC dielectric spectroscopy................................166–167
AC electrokinetic techniques............................ 165–166
See also Single biological cells, impedance
spectroscopy and optical analysis
Dielectrophoresis ......................................................61–62,
183–185
for biological characterisation........................... 205–210
cancer cells, separation technique ..................... 213–216
cancer studies ....................................................210–213
classification......................................................201–205
electrode geometries
medium influence .......................................195–196
micro-electrodes..........................................191–193
needles.........................................................190–191
three-dimensional electrode systems .......... 193–195
measurement
collection rate measurements......................185–186
crossover measurements...................................... 186
impedance sensing ..............................................186
levitation height measurement ...........................186
particle velocity measurements ........................... 186
modelling and interpretation
theory of particle modelling........................ 187–189
usage....................................................................73, 200
Dielectrophoretic impedance measurement ...................209
Dielectrophoretic separation........................................... 152
Diffusion immunoassay (DIA).........................................74
Dimethyl sulfoxide (DMSO) .........................................211
DMA, see N,N-dimethylacrylamide
DNA and proteins analysis, CE method ................... 73–74
Dry etching .................................................................35–38
See also Etching
Dynamic coating procedures, in EOF............................130
E
E-beam evaporators .......................................................... 25
EDL model, see Electrical double-layer
model
Elastomeric membranes, microfabrication ................. 84–85
Electrical double-layer model .........................................122
Electrical rule check (ERC)............................................238
Electric field geometry, importance................................ 155
Electrode geometries, in DEP
medium influence .............................................195–196
micro-electrodes................................................191–193
needles...............................................................190–191
three-dimensional electrode systems ................193–195
See also Dielectrophoresis
Electrohydrodynamic (EHD)........................................... 61
Electrokinetic methods, microfluidic devices
dielectrophoresis (DEP) ....................................... 61–62
electroosmosis .............................................................61
EP .........................................................................60–61
electrorotation (ROT) ..........................................62–63
See also Microfluidics
Electromagnetic induction, advantage ........................... 241
Electron-beam evaporator, usage ..................................... 25
Electron cylclotron resonance (ECR)............................... 37
Electroosmotic flow (EOF)............................110, 121–122
control and modification, coatings used...........129–130
polymers used for EOF control ........................ 131–133
principles...........................................................112–113
theory ................................................................122–123
advantages and limitation ........................... 128–129
charge distribution ......................................123–124
cylindrical capillary......................................124–125
flow profile..................................................125–127
pH and ionic concentration effect .............. 127–128
transient flow time scale ..................................... 127
See also Microfabrication techniques
Electrophoresis (EP), definition and
application.................................................60–61
Electroplating .............................................................29–30
Electrorotation (ROT) ............................................... 62–63
and cell lysis ..........................................................69–70
cell properties measurements ....................................152
See also Microfluidics
Enzyme-linked immunosorbent assay
(ELISA).................................................... 74, 81
Etching
dry etching ............................................................35–38
metal etchants ....................................................... 33–35
248
MICROENGINEERING IN BIOTECHNOLOGY
Subject Index
plasma processes.................................................... 38–40
wet etching............................................................30–33
See also Microfabrication techniques
1-Ethyl-3-(dimethylamino)propylcarbodiimide (EDC).... 102
F
Field-flow fractionation (FFF)............................... 214, 215
Fluorescence-activated cell sorter (FACS)......... 70, 72, 150
G
Gastro-oesophageal reflux disease.................................. 225
Genistein (GEN)............................................................212
GERD, see Gastro-oesophageal reflux disease
Giardia muris...................................................................209
Glass fluidic systems, EOF in ........................................122
Glass substrates, application ............................................... 6
Guard ring, usage....................................................158–159
H
Hardware description language ......................................238
HDL, see Hardware description language
Helmholtz-Smoluchowski relation, usage .....................122
HEPA, see High efficiency particulate air
Hexamethyldisilazane (HMDS).................................14, 83
Hexamethylene bisacetamide..........................................211
H-filter.............................................................................. 60
High efficiency particulate air ..........................................42
HMBA, see Hexamethylene bisacetamide
Human medicine and wireless capsule device ........ 225–228
See also Wireless endoscopy
Hydrodynamic pumping, advantage and disadvantage .. 110
I
ICP, see Inductively coupled plasma
IEF, see Isoelectric focusing
Impedance sensing, role.................................................. 186
See also Dielectrophoresis
Impedance spectroscopy, see Single biological cells,
impedance spectroscopy and optical analysis
Indium tin oxide (ITO) .................................................... 33
Inductively coupled plasma............................................... 36
Industrial, scientific and medical .................................... 229
Inflammatory bowel diseases (IBDs).............................. 226
Integrated circuit (IC) ........................................................1
aluminum....................................................................33
fabrication .....................................................................2
formation ......................................................................4
packaging .................................................................... 13
Integrated sensors, role ...........................................231–236
Interdigitated castellated electrodes, role ....................... 192
See also Dielectrophoresis
Ion assisted etching...........................................................39
Ion beam etching ........................................................ 38, 39
Ion enhanced etching........................................................ 39
Ion-sensitive field effect transistor .................234, 242, 243
Iridium oxide film (IrOx), usage .................................... 156
ISFET, see Ion-sensitive field effect transistor
ISM, see Industrial, scientific and medical
Isochrysis galbana..............................................................177
Isoelectric focusing............................................................73
Isopropyl alcohol (IPA) ........................................19, 20, 44
L
Lab-on-a-chip system..................................................... 153
Laboratory-in-a-pill device............................................. 232
Laminar flow and microfluidic channel ..................... 57–58
See also Microfluidics
Laser printer, role .............................................................86
Layout versus schematic .................................................. 238
LIAP, see Laboratory-in-a-pill device
LIGA, see Lithographie, galvanoformung, and abformung
Light-emitting diodes (LEDs)....................................... 228
Lithographie, galvanoformung, and abformung .............. 18
Lithography, microfabrication techniques
descum and hard bake.................................................19
developing.............................................................18–19
lithography tools and exposure ............................. 16–18
resist stripping....................................................... 19–20
rinsing and drying....................................................... 22
spinning................................................................. 14–16
substrate cleaning.................................................. 20–22
See also Microfabrication techniques
Low pressure CVD (LPCVD)......................................... 28
LVS, see Layout versus schematic
M
Macromedia Freehand, role.............................................. 86
Magnetron sputtering system ..................................... 26–27
MAP, see Microlens Array Photolithography
Marangoni effect............................................................... 22
See also Microfabrication techniques
MDR, see Multidrug resistance
MEA, see Microelectrode arrays
MEMS, see Micro-electro-mechanical systems
Metal etchants ............................................................ 33–35
See also Etching
Metal organic CVD (MOCVD)................................ 28–29
Metal substrates, application .............................................. 6
Microelectrode arrays........................................................68
Micro-electro-mechanical systems .....................55, 63, 232
Microengineered neural probes
characteristics............................................................136
cuff electrode.....................................................136–138
penetrating electrodes .......................................140–146
regenerating electrodes ..................................... 138–140
Microfabricated broadband single-cell dielectric
spectroscopy, usage .........................................72
MICROENGINEERING IN BIOTECHNOLOGY
249
Subject Index
Micro-fabricated electrodes, usage ......................... 191–193
See also Dielectrophoresis
Microfabrication techniques............................... 1–4, 81–82
chemical vapor deposition (CVD)........................ 28–29
contamination control........................................... 40–41
cleaning ................................................................. 44
clean rooms .....................................................42–43
counting particles..................................................41
facilities ...........................................................45–46
human behavior ..............................................43–44
metrology ........................................................47–48
wafer handling ................................................ 41–42
water................................................................46–47
wipers ..............................................................44–45
electroplating......................................................... 29–30
etching
dry etching ......................................................35–38
metal etchants ................................................. 33–35
plasma processes.............................................. 38–40
wet etching......................................................30–33
lithography
descum and hard bake........................................... 19
developing.......................................................18–19
lithography tools and exposure ....................... 16–18
photoresist spinning defects.................................. 16
resist stripping................................................. 19–20
rinsing and drying................................................. 22
spinning...........................................................14–16
substrate cleaning............................................ 20–22
photomask design ..................................................... 6–7
alignment keys ......................................................11
photomasks .......................................................7–14
photoresist profiles................................................10
process bias during exposure and etching............... 9
substrate, selection and specifications....................... 4–6
thin film deposition
chemical vapor deposition............................... 28–29
electroplating................................................... 29–30
high-vacuum pumps .............................................24
physical vapor deposition................................25–28
thin films............................................................... 25
vacuums system............................................... 23–25
See also Microengineered neural probes
Microfluidic channels, fabrication..............................96–98
See also Microstructures fabrication, by soft lithography
Microfluidic chip, process flow for .................................170
Microfluidics............................................................... 55–56
applications
cellular manipulation and analysis .................. 66–72
macromolecules...............................................73–74
device fabrication
biocompatibility .................................................... 65
polymer-based microfluidics...........................64–65
silicon and glass based micromachining ......... 63–64
fluids behaviour, at small scale
diffusion ..........................................................58–60
electrokinetic...................................................60–63
laminar flow .................................................... 57–58
surface to volume effects....................................... 63
Microlens Array Photolithography ......................83, 89–93
Microlens projection photolithography, procedure.... 91–93
Micromachining, defined ...................................................4
See also Microfabrication techniques
Microreactors, chemical synthesis .......................... 109–112
electroosmotic flow........................................... 112–113
peptide synthesis ...............................................113–116
product purification ..........................................116–118
See also Electroosmotic flow (EOF)
Microscope Projection Photolithography.............83, 88–89
Microscopic physics, of EOF .................................122–123
Microstereolithography technique.............................. 65–66
Microstructures fabrication, by soft lithography ........ 81–82
fabrication of engineered surface ........................ 98–102
fabrication of masters
contact photolithography................................86–88
MAP ...............................................................89–93
MPP................................................................ 88–89
transparency-based photomasks fabrication..........84–86
fabrication of microfluidic channels .....................96–98
fabrication of PDMS replicas ............................... 93–96
materials................................................................83–84
Micro Total Analysis Systems ........................................149
Miniaturised total analytical systems..............................111
Miniaturized electrical approaches ................................. 151
MPP, see Microscope Projection Photolithography
mTAS, see Micro Total Analysis Systems; Miniaturised
total analytical systems
Multidrug resistance ....................................................... 210
N
Nanosecond pulsed electric fields (nsPEF) ...................... 69
Navier–Stokes (NS) equation......................................... 125
Needles electrode, usage ......................................... 190–191
See also Dielectrophoresis
Negative dielectrophoresis (nDEP)..............62, 70, 72, 167
Neural probes.................................................................. 135
See also Microengineered neural probes
Neural recordings development.............................. 135–136
NeuroControl Corporation, usage ................................. 138
N,N-diethylacrylamide ...................................................130
N,N-dimethylacrylamide ................................................ 130
Non-volatile residue (NVR)............................................. 41
O
Oil diffusion pump, characteristics...................................24
See also Microfabrication techniques
Optical analysis, for single biological cells.............. 149–150
cell level discrimination .................................... 150–152
250
MICROENGINEERING IN BIOTECHNOLOGY
Subject Index
cell manipulation...............................................167–169
chip fabrication process.....................................170–174
detection techniques
dielectric properties determination............. 162–167
impedance measurement............................. 153–160
optical detection..........................................160–161
sample preparation and chip maintenance ......... 161–162
measurements....................................................174–179
system platform and integration .......................152–153
Optical sensors, role........................................................ 232
P
Paralysed Hand Control System, usage.......................... 138
PBSC, see Peripheral blood stem cell
PDMS, see Polydimethoxysilane; Polydimethylsiloxane
Penetrating electrodes.............................................140–146
See also Microengineered neural probes
Pentafluorophenyl (PFP) ester .......................................117
Peptide synthesis, in microreactor .......................... 113–116
See also Microreactors, chemical synthesis
Perchloric acid (HClO
4
), usage........................................ 31
Peripheral blood stem cell............................................... 214
Photographic techniques, usage......................................141
Photomask design
chrome ........................................................................13
design stage...............................................................7–8
limitation...............................................................11–12
objective ....................................................................6–7
price determining.......................................................... 8
process bias.................................................................... 9
shadow mask......................................................... 13–14
See also Microfabrication techniques
Photomask, generation ..................................................... 84
Photoresist spinning defects ............................................. 16
Photosensitive polyimide precursor, usage ............. 170–171
Physical vapor deposition (PVD) ............................... 25–28
Phytoplankton, measurement and analysis............. 176–179
See also Single biological cells, impedance spectroscopy
and optical analysis
Plasma enhanced CVD (PECVD)...................................28
Plasma etching.................................................................. 38
See also Etching
Platinum wire for electrodes, usage ................................ 137
Plug-like flow, of EOF................................................... 126
PMMA, see Polymethyl methacrylate substrates
Poisson–Boltzmann (PB) equation ................................ 124
Polycarbonate, usage......................................................... 65
Polydimethoxysilane ...................................................18, 66
Polydimethylsiloxane ................................................64–65,
83, 103
fabrication ............................................................. 93–96
and photoresist-coated wafer......................................90
Polyimide–polyimide bonding process, feature...........171–172
Polymer-based microfluidics ......................................64–65
Polymer chains, in PDMA and PDEA.......................... 130
Polymers, for EOF control
covalent coatings....................................................... 132
dynamic coating ................................................131–132
See also Electroosmotic flow (EOF)
Polymer substrates, application ..........................................6
Polymethyl methacrylate substrates............................ 18, 65
Polynomial electrodes, usage ..................................192, 193
Potentiometric sensors, usage.........................................234
Pressure-driven flow (PDF) ........................................... 167
Printed circuit board (PCB) ........................................... 215
Projection printers, usage..................................................17
R
Radio-frequency identification....................................... 228
Reactive ion etching....................................................35, 38
Regenerating electrodes.......................................... 138–140
See also Microengineered neural probes
Reticle, advantage ............................................................... 7
See also Microfabrication techniques
Reynolds number ..............................................................57
RFID, see Radio-frequency identification
Rhodosorus m.................................................................... 177
RIE, see Reactive ion etching
ROT torque, measurement......................................... 62–63
Rough pump, usage .................................................... 23–24
See also Microfabrication techniques
S
S. cerevisiae .............................................................. 206, 207
Selenastrum capricornutum ............................................... 209
Self-assembled monolayers (SAMs)........................... 68, 98
Shadow mask .............................................................. 13–14
Signal processing, in cuff electrodes ...............................137
Silicon and glass based micromachining ....................63–64
See also Microfluidics
Silicon substrate, advantage............................................ 5–6
Single biological cells, impedance spectroscopy and optical
analysis .................................................. 149–150
cell level discrimination .................................... 150–152
cell manipulation...............................................167–169
chip fabrication process.....................................170–174
detection techniques
dielectric properties determination............. 162–167
impedance measurement............................. 153–160
optical detection..........................................160–161
sample preparation and chip maintenance ... 161–162
measurements....................................................174–179
system platform and integration .......................152–153
Single-cell electroporation................................................69
Soft lithography, in microstructures fabrication......... 81–82
engineered surface fabrication ............................98–102
masters fabrication ................................................84–93
materials................................................................83–84
MICROENGINEERING IN BIOTECHNOLOGY
251
Subject Index
Soft lithography (continued)
microfluidic channels fabrication.......................... 96–98
PDMS replicas fabrication ................................... 93–96
Spin on glasses (SOG)......................................................16
Sputter etching.................................................................. 38
Staphylococcus epidermidis................................................. 209
Steppers, usage..................................................................17
Stern, Helmholtz, compact or inner layer .............. 122–123
Substrates, in microfabrication .......................................4–6
See also Microfabrication techniques
SU-8, role ......................................................................... 87
Synechococcus sp................................................................ 177
System-on-chip (SoC)....................................................230
System platform and integration ............................152–153
T
Tetramethyl ammonium hydroxide.................................. 18
Thermal evaporator, usage................................................ 25
Thermoelectric sensors, role ........................................... 232
Thin film deposition
chemical vapor deposition..................................... 28–29
electroplating......................................................... 29–30
physical vapor deposition......................................25–28
evaporator schematics ........................................... 26
magnetron sputtering system................................ 27
stresses in .............................................................. 28
thin films.....................................................................25
vacuums................................................................. 23–25
See also Microfabrication techniques
Titanium sputter pump, characteristics ............................ 24
TMAH, see Tetramethyl ammonium hydroxide
Transient flow time scale................................................ 127
See also Electroosmotic flow (EOF)
T-sensor ......................................................................59–60
See also Microfluidics
Turbomolecular pump, characteristics.............................. 24
See also Microfabrication techniques
U
Utah Intracortical Electrode Array
(UIEA)..........................................................144
V
Vagus Nerve Stimulation System,
usage..............................................................138
Vapor prime systems, advantages ..................................... 14
Voltage-clamp circuit, usage........................................... 136
Voltammetric sensors, role ............................................. 232
See also Wireless endoscopy
W
Water system, continuous flow deionized........................ 46
Wet etching, role ........................................................ 30–33
See also Etching
Wireless endoscopy................................................. 221–223
applications
animal applications .............................................228
human medicine..........................................225–228
environment......................................................239–241
packaging .......................................................... 241–243
system design methodology ..............................236–237
analogue electronic front-end signal
design ....................................................237–238
digital system design...................................238–239
technology
capsule system design..................................230–231
design constraints........................................ 228–229
integrated sensors........................................231–236
traditional diagnostic techniques
invasive techniques.............................................. 224
non-invasive techniques......................................224
See also Microfabrication techniques
252
MICROENGINEERING IN BIOTECHNOLOGY
Subject Index