Cao Z. (Ed.) Thin Film Growth: Physics, materials science and applications
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Thin film growth
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© Woodhead Publishing Limited, 2011
Thin film growth
Physics, materials science and
applications
Edited by
Zexian Cao
Oxford Cambridge Philadelphia New Delhi
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© Woodhead Publishing Limited, 2011
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First published 2011, Woodhead Publishing Limited
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Contributor contact details xi
Preface xv
Part I Theory of thin film growth 1
1 Measuring nucleation and growth processes in thin
films 3
Y. Ho m m a , Tokyo University of Science, Japan
1.1 Introduction 3
1.2 Basic theory of epitaxial growth 4
1.3 Observation method of atomic steps 6
1.4 Two-dimensional-island nucleation and step-ow growth
modes 9
1.5 The motion of atomic steps on a growing and
evaporating Si(111) surface 11
1.6 Morphological instability of atomic steps 15
1.7 Conclusion and future trends 17
1.8 References 17
1.9 Appendix 18
2 Quantum electronic stability of atomically uniform
films 22
T. mi l l e r and T.-C. CH i a n g , University of Illinois at
Urbana-Champaign, USA
2.1 Introduction 22
2.2 Electronic growth 23
2.3 Angle-resolved photoemission spectroscopy 25
2.4 Atomically uniform lms 28
2.5 Quantum thermal stability of thin lms 29
2.6 General principles of lm stability and nanostructure
development 35
Contents
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© Woodhead Publishing Limited, 2011
2.7 Beyond the particle-in-a-box 46
2.8 Future trends 47
2.9 Acknowledgments 48
2.10 References 48
3 Phase-field modeling of thin film growth 52
a. Vo i g T , Technische Universität Dresden, Germany
3.1 Introduction 52
3.2 Modeling 53
3.3 Numerical results 54
3.4 Conclusion 57
3.5 References 58
4 Analysing surface roughness evolution in thin films 60
Y. Ka j i K a w a , The University of Tokyo, Japan
4.1 Introduction 60
4.2 Roughness during homo-epitaxial growth 61
4.3 Roughness during hetero- or non-epitaxial growth 69
4.4 Future trends 76
4.5 References 77
5 Modelling thin film deposition processes based on
real-time observation 83
S. Ko w a r i K , Humboldt Universität zu Berlin, Germany and
a. Hi n d e r H o f e r , a. ge r l a C H and f. SC H r e i b e r , Universität
Tübingen, Germany
5.1 Introduction: time resolved surface science 83
5.2 Basics of growth and relevant length of and timescales
for in-situ observation of lm deposition 84
5.3 Experimental techniques for real-time and in-situ studies 87
5.4 Experimental case studies 101
5.5 Future trends 113
5.6 Sources of further information and advice 114
5.7 References 114
Part II Techniques of thin film growth 121
6 Silicon nanostructured films grown on templated
surfaces by the oblique angle deposition 123
d. Ye, Virginia Commonwealth University, USA and T.-m. lu,
Rensselaer Polytechnic Institute, USA
6.1 Introduction 123
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viiContents
© Woodhead Publishing Limited, 2011
6.2 Preparation of templated surface for oblique angle
deposition 126
6.3 Fan-out on templated surface with normal incident ux 130
6.4 Fan-out growth on templated surfaces with oblique angle
incident ux 140
6.5 Control of fan-out growth with substrate rotations 144
6.6 Applications and future trends 148
6.7 References 151
7 Phase transitions in colloidal crystal thin films 155
f. ra m i r o -ma n z a n o , e. bo n e T , i. ro d r í g u e z and f. me S e g u e r ,
Centro de Tecnologías Físicas, Unidad Asociada ICMM-CSIC/UPV,
Universidad Politécnica de Valencia, Spain
7.1 Introduction 155
7.2 Experimental tools 157
7.3 Description of colloidal crystal phases: historical survey 160
7.4 Phase transition sequence in colloidal crystal thin lms 178
7.5 Conclusions and future trends 181
7.6 Acknowledgements 181
7.7 References 182
8 Thin film growth for thermally unstable noble-metal
nitrides by reactive magnetron sputtering 185
z. Ca o , Chinese Academy of Sciences, P. R. China
8.1 Introduction 185
8.2 Deposition of stoichiometric Cu
3
N 190
8.3 Nitrogen re-emission 198
8.4 Doping of Cu
3
N by co-sputtering 203
8.5 Conclusions 209
8.6 References 209
9 Growth of graphene layers for thin films 211
b. H. Ho n g and H. r. je o n , Sungkyunkwan University,
South Korea
9.1 Introduction 211
9.2 Large-scale pattern growth of graphene lms for
stretchable transparent electrodes 211
9.3 Roll-to-roll production of 30-inch graphene lms for
transparent electrodes 218
9.4 Conclusions 225
9.5 References 225
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viii Contents
© Woodhead Publishing Limited, 2011
10 Epitaxial growth of graphene thin films on single
crystal metal surfaces 228
j. Co r a u x , Institut Néel, France and a. T. n’di a Y e , C. bu S S e
and T. mi C H e l Y , Universität zu Köln, Germany
10.1 Introduction 228
10.2 Structure of graphene on metals 229
10.3 Growth of graphene on a metal 237
10.4 Future trends 249
10.5 Sources of further information and advice 250
10.6 Acknowledgements 250
10.7 References 250
11 Electronic properties and adsorption behaviour of
thin films with polar character 256
n. ni l i u S , Fritz-Haber-Institut der MPG, Germany
11.1 Introduction to oxide polarity 256
11.2 Polar oxide lms 261
11.3 Measuring polarity of thin oxide lms 264
11.4 Adsorption properties of polar lms 272
11.5 Conclusion and future trends 282
11.6 Sources of further information and advice 283
11.7 Acknowledgements 283
11.8 References 284
12 Polarity controlled epitaxy of III-nitrides and ZnO by
molecular beam epitaxy 288
x. Q. wa n g , Peking University, P. r. China and a. Yo S H i K a w a ,
Chiba University, Japan
12.1 Introduction 288
12.2 Lattice polarity and detection methods 289
12.3 Polarity issues at heteroepitaxy and homoepitaxy 292
12.4 Polarity controlled epitaxy of GaN and AlN 297
12.5 Polarity controlled epitaxy of InN 300
12.6 Polarity controlled epitaxy of ZnO 309
12.7 Conclusions 313
12.8 References 314
13 Understanding substrate plasticity and buckling of
thin films 317
f. fo u C H e r , Centre de Biophysique Moléculaire – CNRS, France
and C. Co u P e a u , j. Co l i n , a. Ci m e T i è r e and J. gr i l H é , Université
de Poitiers, France
13.1 Introduction 317
13.2 Experimental observations 320
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ixContents
© Woodhead Publishing Limited, 2011
13.3 Modelling 322
13.4 Discussion 329
13.5 Conclusions 336
13.6 References 338
14 Controlled buckling of thin films on compliant
substrates for stretchable electronics 340
j. So n g , University of Miami, USA and j. wu and Y. Hu a n g ,
Northwestern University, USA
14.1 Introduction 340
14.2 Mechanics of one-dimensional non-coplanar mesh design 343
14.3 Mechanics of two-dimensional non-coplanar mesh design 347
14.4 Conclusions 361
14.5 References 361
15 The electrocaloric effect (ECE) in ferroelectric
polymer films 364
S.-g. lu and Q. m. zH a n g , The Pennsylvania State University,
USA and z. Ku T n j a K , Jozef Stefan Institute, Slovenia
15.1 Introduction 364
15.2 Thermodynamic considerations on materials with large
electrocaloric effect (ECE) 365
15.3 Previous investigations on electrocaloric effect (ECE) in
polar materials 369
15.4 Large electrocaloric effect (ECE) in ferroelectric polymer
lms 371
15.5 Future trends 379
15.6 Conclusion 380
15.7 Acknowledgements 381
15.8 References 381
16 Network behavior in thin films and nanostructure
growth dynamics 384
H. gu C l u , University of Pittsburgh, USA, T. Ka r a b a C a K ,
University of Arkansas at Little Rock, USA and m. Yu K S e l ,
University of Nevada – Reno, USA
16.1 Introduction 384
16.2 Origins of network behavior during thin lm growth 390
16.3 Monte Carlo simulations 390
16.4 Results and discussion 392
16.5 Conclusions 399
16.6 References 401
Index 404
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