Oxygen barrier, 257, 258
Permeability, 259
Physical vapor deposition, 253,
254
Polymerization, 254
Principle of vacuum deposition,
253
Process parameters, 256, 257
Surface properties, 260
R
Robotics, 315–23
Micro-robot examples, 319–22
Hexapod M-850 Micro-robot,
320
MFI Project, 322
Micro-air-vehicle, 320
Open-source Micro-robotic
Project, 320
Strider Micro-robot, 321
Waalbot, 320
Micro-robotics applications,
316–18
Micro-assembly, 317
Micro-handling, 317–18
Robot definitions, 315–16
Sensors and Actuators in micro-
robotics, 318–19
Actuators, 319
Micro-motors, 319
Piezoelectric actuators, 319
Sensors, 318–19
S
Surface Engineering, 221–40
Applications in Micro-
Manufacturing, 230
Cutting tools, 230–33
Micro-forming, 221, 232–36
Tool fabrication, 237
Focussed ion beam (FIB),
237
Electroforming, 235
Photolithography, 235
Chemical vapor deposition (CVD),
225
Diamond like carbon (DLC),
226, 230, 233–37
Plasma Assisted CVD, 225–26
Thermal CVD, 225–26
Electrodeposition, 225, 236
Electroless Ni, 225
Electroplating, 225
Hard Chromium, 225
Ion implantation, 224
Physical vapor Deposition (PVD),
226
Cathodic arc evaporation, 227
Chromium based coatings,
229–30
CrN, 230, 234
CrCN, 230
Duplex, 230
Electron beam, 227
Magnetron sputtering, 227
Ion beam assisted
deposition, 227
Closed field unbalanced
magnetron sputtering,
231
HIPIMS, 227
Titanium based coatings,
228–30, 232, 234
TiN, 228–31
TiAlN, 228–31, 234
(Al,Si)TiN, 228, 230, 232
Plasma nitriding, 222–23, 230
Tribology, 221, 222
Built up edge (BUE), 231
Coefficient of friction, 221, 225,
226, 230, 233, 237
Corrosion, 221, 222, 225
DLC, 226, 227, 230, 234, 235
Galling, 230, 234
Losses due to wear, 221
Low friction coatings, 226, 227,
230, 234, 235
Me:C, 226, 227, 230, 234, 235
MoS2, 226, 227, 230, 234, 235
Sticking, 230, 234
Wear, 221, 222, 224, 228
Sustainability of Micro-manufacturing,
394–404
Application of DFE, 399–400
Carbon nanotubes reinforced
polymer, 399
DFIP, 399
Fibres characteristics in recycled
polymer, 399
Handling and assembly use, 399
Integration of functions, 399
Material selection, 399–400
Micro factories, 400
Design for Environment (DEF),
397–98
DFD - design for de-assembly,
398
DFMA - design for
manufacturing and assembly,
398
DFR - design for recycling, 398
DFRm - design for
remanufacturing, 398
EBM - environment benign
manufacturing, 398
ReUse, 397
EcoDesign, 397
Ethical Issues, 401
LCA for micro components,
396
Clean room classes, 396
Types of micro components, 396
Life Cycle Assessment, 394–96
DFE, 394
EcoDesign rules, 394
Environmental impact, 394
Functional unit, 395
Goal and scope, 395
LCA theory, 394
Material-use data, 396
Process data, 395
Product directives, 395
System boundaries, 395
T
Testing and Diagnosis for Micro-
manufacturing Systems, 344–65
Micro-devices and machines,
360–64
Precision measurement systems,
347–53
Mixed qualitative-quantitative
analysis systems, 352
SEM, AFM and STM, 352
Index 413