1314 ADVANCED MATERIALS IN TELECOMMUNICATIONS
two fixed plates. Motion is detected when the spacing between these elements
changes. As one can image, in the case of an airbag, the performance of these
devices is vital. There should be no impediment to sensing deceleration. As a
result, hermaticity is imperative and has been achieved successfully with CER-
DIP hermetic packages.
18
Analog devices have developed a successful scheme
to precisely orient the package and maintain the sensitivity of the device.
Ink-jet technology, dubbed the first MEMS technology, requires a different
set of criteria. In this configuration, a heater element forms microscopic bubbles
that eject ink through a silicon-based nozzle. Here, a package must not block
the jets of ink, yet it must be protected from them. One approach is the creation
of a flexible circuit array bonded to the ink jets with a polymer.
Optical MEMS products add another layer of complexity, as access to the
outside environment is required. In these products a light path is commonly
needed to provide light to the ‘‘eyes’’ of the MEMS device. Although the re-
quirement seems simple, it is a complex task to achieve. As a result of these
rigid constraints, most optical MEMS systems require vacuum hermaticity to
ensure proper operation of the sensitive components.
Although MEMS packages are application specific, there are some common-
alities among them. For one thing, the device cannot be obstructed and must be
covered by a protective cap. Here, packaging occurs on the wafer level. Another
method of wafer level packaging is a method called ‘‘flip-chip.’’ It entails the
use of a silicon cap with circuitry bonded on top with an encapsulant. The
sealing is done by metallization (diffusion solder) or epoxy. An underfill is used
to fill the gap between the chips.
2.2 Solid-State Semiconductor Lasers
Advances in material properties have led to ubiquitous deployment of solid-state
lasers in CD players, barcode scanners, and optical communications. Specifi-
cally, lasers with output centered around 1.3 or 1.55
m have been prepared
using molecular beam epitaxy (MBE) and metal–organic chemical vapor dep-
osition (MOCVD) to deposit thin films of (In
1
⫺
x
Ga
x
)(As
1
⫺
y
P
y
) solid solutions,
hereafter referred to as InGaAsP.
19
The wavelength of the laser light can be
selected by choosing a desired lattice constant and then locating the proper
composition (Fig. 5). This allows the materials scientist to lattice match to a
particular substrate and tune to the operating wavelength, which is related to the
bandgap energy of the semiconductor. InGaAsP has been selected as the ideal
material for telecommunication lasers because of the following properties: (a) a
small direct bandgap that allows for efficient conversion of electrical energy to
light at the desired wavelengths, namely 1.28–1.62
m, (b) substrates of InP
grown by the Czochralski technique are commercially available, and (c) tech-
nology to form waveguides has been developed.
The microelectronics industry has migrated toward silicon-based devices,
even though GaAs demonstrates a higher electron mobility. However, neither of
these candidates possess the qualities of InGaAsP. Specifically, silicon possesses
an indirect bandgap that prohibits the radiative recombination of electron-hole
pairs. Further, GaAs with superior electrical performance and a direct bandgap
emits light in the visible spectrum when doped with aluminum. For this reason,
(Al,Ga)As devices are found everywhere as red light-emitting diodes and lasers;