296 C.A. Sciammarella, F.M. Sciammarella, and L. Lamberti
The profile of the surface in terms of the surface depth h can be obtained from
the equation:
)90sin(2
np
h
i
o
0gr
θ−
=
(25)
where n is the fringe order corresponding to the fact that an equivalent grating of
pitch p
gr0
is modulated by the surface. This relationship is similar to the equation
of shadow-projection moiré except for the factor 2 that comes from the reflection
effect.
In order to verify the reliability of the experimental data gathered with the
above described model, other independent measurements were carried out with a
Surtronic S25 profilometer (Taylor Hobson Ltd.). The ten-point height of the
surface S
z
was chosen as the reference parameter [28,29]. Ten transversal sections
(i.e. in the direction orthogonal to grooves) and ten longitudinal sections (i.e., in
the direction of the furrows present in the surface) were analyzed and the
corresponding ten-point heights were computed. For the profilometer
measurements, two sections of length 8 mm were analyzed both in the
longitudinal (i.e. parallel to the furrows) and transversal direction (i.e.,
perpendicular to the furrows). Optical and mechanical measurements were in good
agreement. The test of significance for small samples revealed that both optical
and mechanical data belong to the same statistical population within 95% level of
confidence.
In the second set of experimental tests, gratings of different pitches were
utilized in order to obtain the surface topography of standard samples. The values
of the roughness average parameter R
a
were determined [28,29]. Surface
roughness measurements carried out for the different calibrated samples were
again in good agreement with profilometer measurements.
3.3 High Accuracy Measurements of Surface Topography
In order to determine the accuracy of the method of surface contouring outlined in
Section 3.2, measurements of the roughness were carried out on an HQC226
precision reference standard certified by NIST according to ANSI B46.1. Figure 15
shows a schematic of the experimental setup. Some modifications have been
introduced with respect to the original setup of Fig. 12. A grating has been added to
the surface of the glass plate. In this way it is possible to obtain more than one
fundamental frequency by utilizing the different frequencies produced by the
grating.
The previous picture shows the interface between the glass surface and the
metallic surface. The surface consists of a saw tooth profile of nominal pitch
L
t
=100 μm and depth h
t
=6 μm. The resultant R
a
(average depth) is 3 μm. This
standard is used to calibrate devices based on the use of stylus probes.
Figure 15 provides a model for the process of contouring that can be also
applied to other surfaces that are not deterministic. The figure illustrates the case
of double illumination but only one illumination beam is analyzed here for the
sake of simplicity.