
aluminum oxide barriers providing very high critical
current density j
c
(well beyond 1 kAcm
2
).
The important issues in the development of this
technology include its extension to higher j
c
(up to
100 kAcm
2
), which is necessary for self-shunted op-
eration of Josephson junctions with maximum speed,
while retaining the low critical current spreads. A re-
lated issue is the chemical–mechanical polishing of
the junction counter electrode, necessary for submi-
crometer junction definition, without disturbing the
ultrathin aluminum oxide layer. Despite considerable
progress in these directions (Miller et al. 1993, Chen
et al. 1999, Patel and Lukens 1999), high j
c
RSFQ
circuits of sufficiently high integration scale have yet
to be developed.
For some (especially space-platform) applications
the increase of operation temperature to B10 K is
important, because of higher refrigeration efficiency.
Niobium nitride-based Josephson junctions with
MgO tunnel barriers capable of operating at such
temperatures have been demonstrated (e.g., Kerber
et al. 1997, and references therein), but their fabri-
cation technology has to be further advanced to
enable VLSI circuit integration.
See also: Josephson Junctions: High-T
c
; Supercon-
ducting Materials: Types of; Superconducting Thin
Films: Materials, Preparation and Properties
Bibliography
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1999 RSFQ cell library; available at: gamayun.physics.
sunysb.edu/RSFQ/Lib/
Bunyk P, Leung M, Spargo J, Dorojevets M 2003 Flux-1 RSFQ
Microprocessor: Physical design and test results. IEEE Trans.
Appl. Supercond. 13, 433–6
Chen W, Rylyakov A, Patel V, Lukens J, Likharev K 1999
Rapid single flux quantum T-flip flop operating up to
770 GHz. IEEE Trans. Appl. Supercond. 9, 3212–5
Dorojevets M, Bunyk P, Zinoviev D, Likharev K 1999 COOL-0:
design for RSFQ subsystem for petaflops computing. IEEE
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Hasuo S, Imamura T, Fujimaki N 1988 Recent advances in
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1997 An improved NbN integrated circuit process featuring
thick NbN ground plane and lower parasitic circuit induct-
ances. IEEE Trans. Appl. Supercond. 7, 2638–43
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ing. In: Weinstock H (ed.) Applications of Superconductors.
Kluwer, Dordrecht, The Netherlands, pp. 247–93
Likharev K, Semenov V 1991 RSFQ logic/memory family: a
new Josephson junction technology for sub-terahertz-clock-
frequency digital systems. IEEE Trans. Appl. Supercond. 1,
3–26
Miller R, Mallison W, Kleinsasser A, Delin K, Macedo E 1993
Niobium trilayer Josephson tunnel junctions with ultra-high
critical current densities. Appl. Phys. Lett. 63 , 1423–5
Patel V, Lukens J 1999 Self-shunted Nb/AlO
x
/Nb Josephson
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K. K. Libharev
State University of New York, Stony Brook
New York, USA
Super-resolution: Optical and Magnetic
Techniques
In optical recording, an optical head focuses the beam
from a semiconductor laser to produce a probe spot
on the recording medium. The focused spot has a
Gaussian intensity profile and a width determined ul-
timately by the laws of diffraction. When limited only
by diffraction, the diameter of the spot is directly
proportional to the wavelength of the laser radiation,
and inversely proportional to the numerical aperture
(NA) of the objective lens. If the width of the spot (d)
is taken as the distance between the half power points,
then in the diffraction limit dD0.56l/NA. In magne-
to-optics, as with most optical recording technologies,
it is, however, possible to write ‘‘marks’’ much smaller
than the total width of the diffraction-limited spot
Figure 6
Preliminary design of the HTMT petaflops-scale
computer room. Note that despite the RSFQ ‘‘COOL’’
subsystem being responsible for all the ‘‘number
crunching,’’ it occupies o1m
3
, just a tiny fraction of the
whole machine size. This compactness is possible owing
to the extremely low power dissipation of RSFQ
circuits, and is very important for providing very low
(20 ns) interprocessor communication latency (courtesy
of J. Morookian and L. Bergman, Jet Propulsion
Laboratory).
1215
Super-resolution: Optical and Magnetic Techniques