
20-88 Mechatronic Systems, Sensors, and Actuators
As nanotechnology progresses, many more advances in the area of sub-micron/sub-microsecond temper-
ature measurements will become vital, since many of the traditional means of measuring temperature are
not easily adapted to small local temperature measurements.
References
Analog Devices Data Sheet for AD590 Temperature Transducer, 1997.
Croarkin, M.C., et al., 1993, “Temperature-electromotive force reference functions and tables for the
letter-designated thermocouple types based on the ITS-90,” National Institute of Standards and
Technology, Monograph 175.
Doebelin, E.O., Measurement Systems, Application and Design, McGraw-Hill, New York, 1990.
Elsayed-Ali, H.E., Juhasz, T., Smith, G.O., and Bron, W.E., 1991, “Femtosecond thermoreflectivity and
thermotransmissivity of polycrystalline and single-crystalline gold films,” Phys. Rev. B, Vol. 43,
pp. 4488–4491.
Gonzales, E.J., Bonevich, J.E., Stafford, G.R., White, G., and Josell, D., 2000, “Thermal transport through
thin films: mirage technique measurements on aluminum/titanium multilayers,” J. Mater. Res.,
Vol. 15, pp. 764–771.
Hostetler, J.L., Smith, A.N., and Norris, P.M., 1997, “Thin-film thermal conductivity and thickness mea-
surements using picosecond ultrasonics,” Micro. Thermophys. Eng., Vol. 1, pp. 237–244.
Hostetler, J.L., Smith, A.N., and Norris, P.M., 1998, “Simultaneous measurement of thermophysical and
mechanical properties of thin films,” Int. J. Thermophys., Vol. 19, pp. 569–577.
Majumdar, A., 1999, “Scanning thermal microscopy,” Ann. Rev. Mater. Sci., Vol. 29, pp. 505–585.
Mangum, B.W. and Furukawa, G.T., 1990, “Guidelines for realizing the international temperature scale
of 1990 (ITS-90),” National Institute of Science and Technology, Technical Note 1265.
National Semiconductor Data Sheet for LM135 series Temperature Sensors, DS005698, 2000.
Paddock, C.A. and Eesley, G.L., 1986, “Transient thermoreflectance from thin metal films,” J. Appl. Phys.,
Vol. 60, pp. 285–290.
Price, D.J., 1947, “The temperature variation of the emissivity of metals in the near infrared,” Proc. Phys.
Soc. (London), Vol. 59, pp. 131.
Rosei, R. and Lynch, D.W., 1972, “Thermomodulation spectra of Al, Au, and Cu,” Phys. Rev. B, Vol. 10,
pp. 474–483.
Shi, L., Plyasunov, S., Bachtold, A., McEuen, P.L., and Majumdar, A., 2000, “Scanning thermal microscopy
of carbon nanotubes using batch-fabricated probes,” Appl. Phys. Lett., Vol. 77, pp. 4295–4297.
Smith, A.N., Hostetler, J.L., and Norris, P.M., 2000, “Thermal boundary resistance measurements using
a transient thermoreflectance technique.” Micro. Thermophys. Eng., Vol. 4, No. 1, pp. 51–60.
Welsh, E. and Ristau, D., 1995, “Photothermal measurements on optical thin films,” Appl. Opt., Vol. 34,
pp. 7239–7253.
20.7 Distance Measuring and Proximity Sensors*
Jorge Fernando Figueroa and H. R. (Bart) Everett
20.7.1 Distance Measuring Sensors
20.7.1.1 Introduction
Range sensors are used to measure the distance from a reference point to an object. A number of
technologies have been applied to develop these sensors, the most prominent being light/optics, computer
vision, microwave, and ultrasonic. Range sensors may be of contact or noncontact types.
*Significant portions of this chapter were condensed from “Sensors for Mobile Robots”, by H. R. Everett, with
permission from A. K. Peters, Ltd., Natick, MA.
9258_C020_Sec_4-6.fm Page 88 Tuesday, October 9, 2007 9:09 PM