142 4 Cutting Tool Materials and Tools
The fundamental differences between PVD coating and the classic HT-CVD pro-
cess can be summarized as follows [Sche88, Schi89, Köni90, Rödh87, Knot89,
Gühr89, VDI3198, VDI3824]:
• The process temperature of 160–600
◦
C means relatively low temperature stress
on the substrate materials, so that temperature-sensitive substrate materials can
also be coated.
• The bending strength of the substrate remains largely unaffected by the low
coating temperature.
• PVD coatings exhibit residual compressive stresses, which currently limit the
possible layer thicknesses to 3–6 μm. Residual compressive stresses reduce the
risk of fracture formation under shock lead and thermal cycling.
• In the PVD process, workpieces that are to be coated require a very careful
pretreatment of the surface and process control in order to guarantee sufficient
adhesion of the coating. CVD coatings have better adhesion due to the effects of
evaporation and diffusion.
• Because of shadowing effects, consistent layer thicknesses can only be partially
realized by means of very costly devices for rotating the parts to be coated. Inner
contours are as a rule only coatable up to a depth/diameter ratio of 1, since the
layer thickness is diminished with increasing depth.
• High number of potential coating systems and substrate materials.
• Besides stable coating systems such as TiN and Ti(C,N), multi-component
metastable phases can also be deposited under the non-equilibrium conditions of
physical vapour deposition. These phases often exhibit structures that do not exist
under equilibrium conditions. An example of this is the coating system TiAlN.
We can distinguish several different methods of PVD coating:
• methods with thermal evaporation (vacuum evaporation)
• methods with arc evaporation (arc-PVD)
• methods with cathode evaporation (sputtering)
Thermal Evaporation (Vacuum Evaporation)
In vacuum evaporation, usually the coating material is evaporated in a crucible with
a resistance heater or an electron beam gun (EB-PVD) in high vacuum at a pressure
of 10
–3
–10
–6
Pa (Fig. 4.36). The vapour atoms exhibit average free path lengths
of up to several meters at these pressures. Therefore, they generally do not interact
with each other and proceed straight to the substrate. Since the latter is considerably
colder than the vapour, the particles condense on the substrate in accordance with the
principle of water vapour. A columnar fine crystalline layer is formed [Möhw96].
Due to the straight path of the particles, the substrate material must be moved in
the coating chamber in order to avoid shadowing effects and inconsistent coating
thicknesses. Vacuum evaporation allows for high coating rates (coating thickness
increase per unit time) and is used above all for optical applications, in mass pro-
duction for large-scale metallization of films, plastic parts and paper as well as for
coating turbine blades (EB-PVD) [Sche88, Rass96].