4.4 Coatings 131
TiCl
4
+ CH
4
+ nH
2
1000
◦
C
−−−−−−−−→
10 − 150 mbar
TiC + 4HCl + nH
2
(4.1)
This process allows us to deposit hard materials like TiC, TiN, Ti(C
x
N
y
),
(Ti,Hf)(C,N), (Zr/C,N), Al
2
O
3
, AlON and others as single coats or in different com-
binations as multilayer coats. The coating material is formed by chemical reaction
from the gaseous phase directly on the surface of the parts to be coated. The reac-
tion products rinse the substrates so that no shading effects arise. Parts with complex
geometries can thereby be coated thoroughly and consistently without difficulty.
Cemented carbides that are coated with the classic high temperature CVD pro-
cess are characterized by high wear resistance due to their relatively thick hard
material coatings (up to 20 μm for turning and up to 6 μm in the case of milling).
The high process temperature is problematic in the case of coating tool and heat-
treated steels. In this case, coating must be followed by rehardening, making the
material vulnerable to unacceptable warpage.
A further disadvantage to the HT-CVD coating process is that the toughness of
the coated cemented carbide body is reduced in comparison to the uncoated sub-
strate. The causes for this loss of toughness in HT-CVD coating are extraordinarily
complicated. They include on the one hand the properties of the substrate to be
coated (chemical composition, crystalline structure, grain size, thermal expansion,
bending and pressure strength, pre-treatment) and process control on the other hand
(gas atmosphere, pressure conditions, temperature/time cycle). Furthermore, pro-
cesses taking place during coating in the rim zone (formation of eta phases), residual
stresses present in the substrate, transition zone (interface) and hard material layer
as well as the microstructure, texture, thickness and adhesion of the applied coating
are all mutually responsible for toughness reduction in HT-CVD coating.
We will now consider more closely processes in the rim zone (eta phase
formation), the “temperature/time cycle” in the coating process and coating thick-
ness based on all the above factors, which offer us many starting points for the
improvement of toughness in coated cemented carbides.
During the high temperature CVD coating process, there is a danger of form-
ing brittle phases in the interface. Cemented carbides of the first generation
exhibited an additional approx. 3–5 μm thick brittle zone with an “eta phase”
(W
6
Co
6
C, W
3
Co
3
C), caused by decarburization processes in the rim zone [Schi89].
Embrittlement from the eta phase has a negative influence on the toughness of
coated cemented carbides.
Figure 4.27 shows the time/temperature transformation chart for a cobalt alloy
with 5% tungsten and 0.23% carbon. It shows typical coating temperatures and
times for the HT-CVD, MT-CVD, PA-CVD and PVD methods. From this chart,
we can see that in the classic HT-CVD and medium temperature CVD process the
area of eta phase precipitation is passed through/tangent. In contrast, no changes in
constitution are to be expected in the case of low temperature coating methods, as
in the PA-CVD or PVD processes [Köni90].