
© 1999 by CRC Press LLC
Fan, L.S. and Woodman, S. (1995a), “Batch Fabrication of Mechanical Platforms for High-Density Data
Storage,” 8th Int. Conf. Solid State Sensors and Actuators (Transducers ’95)/Eurosensors IX, Stock-
holm, Sweden, 25–29 June, pp. 434–437.
Fan, L.S., Ottesen, H.H., Reiley, T.C., and Wood, R.W. (1995b), “Magnetic Recording Head Positioning
at Very High Track Densities Using a Microactuator-Based, Two-Stage Servo System,” IEEE Trans.
Ind. Electron. 42, 222–233.
Fang, W. and Wickert, J.A. (1995), “Comments on Measuring Thin-Film Stresses Using Bi-Layer Micro-
machined Beams,” J. Micromech. Microeng. 5, 276–281.
Friedrich, C.R. and Warrington, R.O. (1998), “Surface Characterization of Non-Lithographic Microma-
chining,” Tribology Issues and Opportunities in MEMS (B. Bhushan, ed.), pp. 73–84, Kluwer Aca-
demic, Dordrecht, Netherlands.
Fujimasa, I. (1996), Micromachines: A New Era in Mechanical Engineering, Oxford University Press,
Oxford, U.K.
Gabriel, K.J., Behi, F., Mahadevan, R., and Mehregany, M. (1990), “In Situ Friction and Wear Measurement
in Integrated Polysilicon Mechanisms,” Sensors Actuators A21–23, 184–188.
Gane, N. and Cox, J.M. (1970), “The Micro-Hardness of Metals at Very Light Loads,” Philos. Mag. 22,
881–891.
Guckel, H. and Burns, D.W. (1989), “Fabrication of Micromechanical Devices from Polysilicon Films
with Smooth Surfaces,” Sensors Actuators 20, 117–122.
Guckel, H., Burns, D., Rutigliano, C., Lovell, E., and Choi, B. (1992), “Diagnostic Microstructures for
the Measurement of Intrinsic Strain in Thin Films,” J. Micromech. Microeng. 2, 86–95.
Gupta, B.K. and Bhushan, B. (1994), “Nanoindentation Studies of Ion Implanted Silicon,” Surf. Coat.
Technol. 68/69, 564–570.
Gupta, B.K., Chevallier, J., and Bhushan, B. (1993), “Tribology of Ion Bombarded Silicon for Microme-
chanical Applications,” ASME J. Tribol. 115, 392–399.
Gupta, B.K., Bhushan, B., and Chevallier, J. (1994), “Modification of Tribological Properties of Silicon
by Boron Ion Implantation,” Tribol. Trans. 37, 601–607.
Hamilton, H. (1991), “Contact Recording on Perpendicular Rigid Media,” J. Magn. Soc. Jpn. 15 (Suppl.
S2), 483–481.
Harris, G.L. (ed.) (1995), Properties of Silicon Carbide, Inst. of Elect. Eng., London.
Henck, S.A. (1997), “Lubrication of Digital Micromirror Devices,” Tribol. Lett. 3, 239–247.
Hokkirigawa, K. and Kato, K. (1988), “An Experimental and Theoretical Investigation of Ploughing,
Cutting and Wedge Forming during Abrasive Wear,” Tribol. Int. 21, 51–57.
Hutchings, I.M. (1992), Tribology: Friction and Wear of Engineering Materials, CRC Press, Boca Raton, FL.
Jaeger, R.C. (1988), Introduction to Microelectronic Fabrication, Vol. 5, Addison-Wesley, Reading, MA.
Koinkar, V.N. and Bhushan, B. (1996a), “Micro/Nanoscale Studies of Boundary Layers of Liquid Lubri-
cants for Magnetic Disks,” J. Appl. Phys. 79, 8071–8075.
Koinkar, V.N. and Bhushan, B. (1996b), “Microtribological Studies of Unlubricated and Lubricated
Surfaces Using Atomic Force/Friction Force Microscopy,” J. Vac. Sci. Technol. A14, 2378–2391.
Koinkar, V.N. and Bhushan, B. (1997), “Scanning and Transmission Electron Microscopies of Single-Crystal
Silicon Microworn/Micromachined Using Atomic Force Microscopy,” J. Mater. Res,12, 3219–3224.
Lazarri, J.P. and Deroux-Dauphin, P. (1989), “A New Thin Film Head Generation IC Head,” IEEE Trans.
Magn. 25, 3190–3193.
Lehr, H. Abel, S., Doppler, J., Ehrfeld, W., Hagemann, B., Kamper, K.P., Michel, F., Schulz, Ch., and
Thurigen, Ch. (1996), “Microactuators as Driving Units for Microrobotic Systems,” Proc. Microro-
botics: Components and Applications (A. Sulzmann, ed.), Vol. 2906, pp. 202–210, SPIE.
Lehr, H., Ehrfeld, W., Hagemann, B., Kamper, K.P., Michel, F., Schulz, Ch., and Thurigen, Ch. (1997),
“Development of Micro-Millimotors,” Min. Invas. Ther. Allied Technol. 6, 191–194.
Li, X. and Bhushan, B. (1998), “Micro/Nanomechanical Characterization of Ceramic Films for Microde-
vices,” Thin Solid Films (in press).