Реферат - MEMS технологии

СПб., СПбИТМО, 2008 г. 100 стр. В учебном пособии рассмотрены процессы формирования микроструктурных элементов фотоники и информационных систем (MEMS и MEOMS), в том числе фотонных кристаллов, основанные на оптических методах: оптической литографии, голографии и фотоотверждения полимеров. Приведены основы современных технологий получения элементов и структур микронных, субмикронных и наноразмеров. Пособие предназначено для бакалавров и магистров,...

Таганрог, ТГТУ, 2009, 120 стр. В учебном пособии рассмотрены основные вопросы, затрагиваемые дисциплины «Компоненты микросистемной техники»: элементы и компоненты микросистем (MEMS. MEOMS), базовых физических принципах их функционирования, характеристиках, конструкциях и особенностях применения. Книга адресована аспирантам и студентам вузов, специализирующихся в области проектирования элементной базы микросистемной техники.

Микро-электромеханическая система. Содержание. Принцип действия и области применения. Базовые понятия. Датчики и микроактюаторы. Самый маленький датчик. Нанодатчики в космосе. «Электромеханика» в телекоммуникациях. Конструктивные особенности и основные характеристики. Технология MEMS. MEMS – дисплей. MEMS – источники питания для портативных устройств. Схемы включения. DMD для DLP. Электромеханическая память. Литература. Приложение А. Системы на о...

Springer Science + Business Media, 2008, Pages: 421 This book investigates the development of networkable smart objects for Ambient Intelligence (AmI) with specific emphasis upon the implementation of the microsystems and nanoscale devices required to achieve effective smart systems. In this context, it seeks to investigate the challenges and potential solutions that will ensure the technology platforms are created to be capable of being seamle...

CRC Press, Taylor & Francis Group, 2 edition, 2006, 647 pages. As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, p...

Springer, 2011. 1185 p. ISBN: 0387473165 MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate material...

Springer, 2011. 304 p. ISBN-10:1441960171 The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by address...

William Andrew Publishing, 2006, 992 p. MEMS, or microelectromechanical systems, claim to be the smallest functional machines that are currently engineered by humans. MEMS is an exciting field with rapidly growing commercial importance. When the field started, it was considered highly speculative, but early successes made researchers bold. Their enthusiasm spread to venture capitalists and eventually resulted in a range of commercially available...

MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice B...

Artech House, 2004, 281 p. Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and m...