Lieberman M.A., Lichtenberg A.J. Principles of plasma discharges and materials processing

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размер 6.21 МБ
добавлен 27 августа 2010 г.

John Wiley & Sons, Inc. , 1994, 572 p.

Preface
Symbols And Abbreviations
Physical Constants And Conversion Factors
Practical Formulae
Introduction
Basic Plasma Equations And Equilibrium
Atomic Collisions
Plasma Dynamics
Diffusion And Transport
DC Sheaths
Chemical Reactions And Equilibrium
Molecular Collisions
Chemical Kinetics And Surface Processes
Particle And Energy Balance In Discharges
Capacitive Discharges
Inductive Discharges
Wave-Heated Discharges
DC Discharges
Etching
Deposition And Implantation
Collision Dynamics
The Collision Integral And Kinetic Theory
Stochastic Heating In An Inductive Discharge
References
Index

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