Lieberman M.A., Lichtenberg A.J. Principles of plasma discharges and materials processing (2-ed.)

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John Wiley & Sons, Inc. , 2-ed, 2005, 757 p.

Preface
Preface To The First Edition
Symbols And Abbreviations
Physical Constants And Conversion Factors
Practical Formulae
Introduction
Basic Plasma Equations And Equilibrium
Atomic Collisions
Plasma Dynamics
Diffusion And Transport
Direct Current (DC) Sheaths
Chemical Reactions And Equilibrium
Molecular Collisions
Chemical Kinetics And Surface Processes
Particle And Energy Balance In Discharges
Capacitive Discharges
Inductive Discharges
Wave-Heated Discharges
Direct Current (DC) Discharges
Etching
Deposition And Implantation
Dusty Plasmas
Kinetic Theory Of Discharges
Appendix A. Collision Dynamics
Appendix B. The Collision Integral
Appendix C. Diffusion Solutions For Variable Mobility Model
References
Index

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