Wiley-VCH, Weinheim, 2008, 457 pages
A panel of inteationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.
Advanced Plasma Technology is a collection of 25 chapters on various aspects of plasma processes authored by well known plasma scientists. We are convinced that this book will be of help to both students and researchers, in academia as well as in the industry.
Basic Approaches to Plasma Production and Control
Plasma Sources and Reactor Configurations
Advanced Simulations for Industrial Plasma Applications
Modeling and Diagnostics of He Discharges for Treatment of Polymers
Three-Dimensional Modeling of Thermal Plasmas (RF and Transferred Arc) for the Design of Sources
and Industrial Processes
Radiofrequency Plasma Sources for Semiconductor Processing
Advanced Plasma Diagnostics for Thin-Film Deposition
Plasma Processing of Polymers by a Low-Frequency Discharge with Asymmetrical Configuration of Electrodes
Fundamentals on Plasma Deposition of Fluorocarbon Films
Plasma CVD Processes for Thin Film Silicon Solar Cells
VHF Plasma Production for Solar Cells
Growth Control of Clusters in Reactive Plasmas and Application to High-Stability a-Si:H Film Deposition
Micro- and Nanostructuring in Plasma Processes for Biomaterials: Micro- and Nano-features as Powerful Tools to Address Selective Biological Responses
Chemical Immobilization of Biomolecules on Plasma-Modified Substrates for Biomedical Applications
In Vitro Methods to Assess the Biocompatibility of Plasma-Modified Surfaces
Cold Gas Plasma in Biology and Medicine
Mechanisms of Sterilization and Decontamination of Surfaces by Low-Pressure Plasma
Application of Atmospheric Pressure Glow Plasma: Powder Coating in Atmospheric Pressure Glow Plasma
Hydrocarbon and Fluorocarbon Thin Film Deposition in Atmospheric Pressure Glow Dielectric Barrier Discharges
Remark on Production of Atmospheric Pressure Non-thermal Plasmas for Mode Applications
Present Status and Future of Color Plasma Displays
Characteristics of PDP Plasmas
Recent Progress in Plasma Spray Processing
Electrohydraulic Discharge Direct Plasma Water Treatment Processes
Development and Physics Issues of an Advanced Space Propulsion
A panel of inteationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.
Advanced Plasma Technology is a collection of 25 chapters on various aspects of plasma processes authored by well known plasma scientists. We are convinced that this book will be of help to both students and researchers, in academia as well as in the industry.
Basic Approaches to Plasma Production and Control
Plasma Sources and Reactor Configurations
Advanced Simulations for Industrial Plasma Applications
Modeling and Diagnostics of He Discharges for Treatment of Polymers
Three-Dimensional Modeling of Thermal Plasmas (RF and Transferred Arc) for the Design of Sources
and Industrial Processes
Radiofrequency Plasma Sources for Semiconductor Processing
Advanced Plasma Diagnostics for Thin-Film Deposition
Plasma Processing of Polymers by a Low-Frequency Discharge with Asymmetrical Configuration of Electrodes
Fundamentals on Plasma Deposition of Fluorocarbon Films
Plasma CVD Processes for Thin Film Silicon Solar Cells
VHF Plasma Production for Solar Cells
Growth Control of Clusters in Reactive Plasmas and Application to High-Stability a-Si:H Film Deposition
Micro- and Nanostructuring in Plasma Processes for Biomaterials: Micro- and Nano-features as Powerful Tools to Address Selective Biological Responses
Chemical Immobilization of Biomolecules on Plasma-Modified Substrates for Biomedical Applications
In Vitro Methods to Assess the Biocompatibility of Plasma-Modified Surfaces
Cold Gas Plasma in Biology and Medicine
Mechanisms of Sterilization and Decontamination of Surfaces by Low-Pressure Plasma
Application of Atmospheric Pressure Glow Plasma: Powder Coating in Atmospheric Pressure Glow Plasma
Hydrocarbon and Fluorocarbon Thin Film Deposition in Atmospheric Pressure Glow Dielectric Barrier Discharges
Remark on Production of Atmospheric Pressure Non-thermal Plasmas for Mode Applications
Present Status and Future of Color Plasma Displays
Characteristics of PDP Plasmas
Recent Progress in Plasma Spray Processing
Electrohydraulic Discharge Direct Plasma Water Treatment Processes
Development and Physics Issues of an Advanced Space Propulsion