Microwave plasma detectors
163
and
N
through atomic emission lines in the vacuum
UV
region. In
1972
these
authors tested a DC-based plasma detection system in combination with a gas
chromatograph. At high sensitivities the metal electrodes started to evaporate,
which made the quartz tube less bright and impeded long term stability. Moreo-
ver, the electrodes reacted with halogens.
With a microwave plasma McLean et al.
[
1
11
reduced the oxygen concentra-
tion to
0.1
-
1
%
and used spectral lines in the visible region for the selective de-
tection of halogens, H, D, C and
N.
They also found that nitrogen could act as a
carbon scavenger and this discovery enabled oxygen to be included in the range
of detectable elements. A commercially available system based on this publica-
tion was produced by Applied Research Laboratories in England. This system
used a low-pressure plasma, generated within an Evenson
214L
resonance cav-
ity. The minimum detectable levels (MDL) were about
100
pg/s. The selectivity
of the elements relative to carbon was only about
100.
Another possibility to improve the MDLs of the low-pressure plasma, was by
increasing the plasma pressure. With the Evenson
214L
cavity, used to create the
plasma, the power reflected to the microwave generator increased with the pres-
sure in the quartz tube. With this cavity it was not possible to operate at an at-
mospheric pressure. Beenakker
[12,13]
described a microwave cavity that is able
to work with He at atmospheric pressure. He reported lower limits of detection
between
1
and
100
pg/s. Using this type of cavity, Quimby et al.
[14]
in
1978,
measured limits around
10
pg/s. At that time it was not yet clear which design
was best to create a plasma. The same group
[15]
reported the use of a DC
plasma, using Ar as a carrier for the determination of metals. Moisan
[16],
and
later Abdallah
[17],
described a Surfatron to create a stable plasma. Our own
experiments with all four types gave rise to the following findings: the Surfatron
appeared to be very difficult to operate and high MDLs were obtained. The DC
or AC plasma did not produce sufficiently low limits of detection for non-metals.
We furthermore encountered problems with the electrodes (reaction and glow-
ing) at high power. Both the low-pressure plasma with the Evenson cavity and
the atmospheric plasma of Beenakker produced lower limits
of
detection, be-
tween
0.1
and
10
pg/s. For the Beenakker cavity this was also reported by Estes
et al.
[18,19].
However the selectivity relative to C impeded the use
of
these
systems.
In order to improve this ratio (about
loo),
Applied Research Laboratories in
the first commercially available instrument, made an improvement by subtract-
ing a fraction
of
the carbon signal from the measured line (e.g. chlorine). This
improved the selectivity ratio relative to carbon to about
1000.
However, the cor-
rection had to be adjusted
for
every emission line and moreover, the correction
was not always proportional to the carbon concentration and could only be ap-
plied over a small concentration range. Wavelength modulation with a refractor
References
p.
200