2nd Edition, revised and expanded. N.Y. : Marcel Dekker, 1997. –
540 p. ISBN: 978-0824798345.
Introduction.
Properties of Gases.
Fluid Flow and Pumping Concepts.
Vacuum Systems.
Coarse Vacuum Pumps.
Vapor Jet (Diffusion) Pumps.
Turbomolecular Pumps.
Cryogenic Pumps.
Gettering and Ion Pumping.
Overloading of Vacuum Pumps.
Ultrahigh Vacuum.
Vacuum Gauges and Gas Analyzers.
Leak Detection.
Publisher's review:
Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation, and high-vacuum system performance. The author delineates the technical and theoretical aspects of the subject without getting in too deep and leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand, technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high-vacuum technology.
Introduction.
Properties of Gases.
Fluid Flow and Pumping Concepts.
Vacuum Systems.
Coarse Vacuum Pumps.
Vapor Jet (Diffusion) Pumps.
Turbomolecular Pumps.
Cryogenic Pumps.
Gettering and Ion Pumping.
Overloading of Vacuum Pumps.
Ultrahigh Vacuum.
Vacuum Gauges and Gas Analyzers.
Leak Detection.
Publisher's review:
Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation, and high-vacuum system performance. The author delineates the technical and theoretical aspects of the subject without getting in too deep and leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand, technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high-vacuum technology.