Francis G., The Glow Discharge at Low Pressure. Encyclopedia of physics, Ed. by S. Flugge, Vol.22

Wiley, New York, 1980, 406 c. Книга содержит следующие разделы: Газы Процессы столкновений в газовой фазе Плазма Тлеющие разряды постоянного тока ВЧ разряды Распыление Плазменное травление

Wiley-VCH, Weinheim, 2008, 457 pages A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics...

Springer, 2005, 496 pages This book provides an overview of modern plasma research with special focus on confinement and related issues. Beginning with a broad introduction, the book leads graduate students and researchers – also those from related fields - to an understanding of the state-of-the-art in modern plasma physics. Furthermore, it presents a methodological cross section ranging from plasma applications and plasma diagnostics to numer...

Springer-Verlag, Berlin, 2009, 732 pages This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams. To compare these theories with inert plasmas, a fundamental descript...

Addison-Wesley Publishing Company, 1992, 384 p. The principal aim of this book is to present a coherent and self-contained account of the fundamental theories in plasma physics, not as an isolated subject, but as an integral part of statistical physics. Intended as a textbook for advanced undergraduate and beginning graduate courses on plasma and statistical physics, the presentation is self-contained and should be read without difficulty by th...

Kluwer Academic Publishers, 2002, 557 p. This book resulted from the NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges, held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in nanotechnology, to the traditional fields of gas lasers, and discharge lamps. Consequent...

Springer-Verlag, 1999, 271 p. Introduction Equilibria of Z-Pinch Plasmas Dynamics of Z-Pinch Plasmas Stability of Z-Pinch Plasmas Rayleigh-Taylor Instability of a Plasma Accelerated by Magnetic Pressure Stability of Dynamic Z-Pinches and Liners Applications of Z Pinches Conclusions References Index

Taylor & Francis, CRC Press, 2006, Pages: 330 Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagn...

Taylor & Francis Group, LLC, Boca Raton, FL, 2006, 680 p. The research on gaseous electronics reaches back more than 100 years. With the growing importance of gas lasers in so many research and industrial applications as well as power systems generating, transmitting, and distributing huge blocks of electrical power, the body of literature on cross sections, drift and diffusion, and ionization phenomena continues to bloom. Searching through t...

IOP, Institute of Physics Publishing, Bristol and Philadelphia, 2001, 645 c. Второй том книги о плазменных технологиях. Содержит разделы: Surface Interactions in Plasma Processing Atmospheric Pressure Plasma Sources Vacuum Plasma Sources Plasma Reactors for Plasma Processing Specialized Techniques and Devices for Plasma Processing Parametric Plasma Effects On Plasma Processing Diagnostics for Plasma Processing Plasma Treatment of Surfaces Surface...