Springer, 2010. — 234 p. — ISBN: 9048125197.
На англ. языке. In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Эта книга представляет собой переработанное и дополненное издание оригинальной работы на русском языке: Механика и физика точных вакуумных механизмов: В 2 т. Т.2 : Монография / Ред. Е. А. Деулин; Моск. гос. техн. ун-т им. Н.Э. Баумана . — М.: Интелвак, 2001-2002. — 152 с. — ISBN 5-932640-43-X. Contents
Preface
About the Authors
Using Precise Mechanisms in Mode Vacuum Technological Equipment
Typical Vacuum Mechanisms
Friction in Vacuum
Matrix Method of the Design of New Mechanisms Structure
Precision of Vacuum Mechanisms
Vacuum Mechanisms of Nanoscale Precision
Ultrahigh Vacuum Rotary-Motion Feedthroughs
Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs
Vacuum Frictionless Mechanisms
Flow of Microparticles Originating from Mechanisms in Vacuum
На англ. языке. In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Эта книга представляет собой переработанное и дополненное издание оригинальной работы на русском языке: Механика и физика точных вакуумных механизмов: В 2 т. Т.2 : Монография / Ред. Е. А. Деулин; Моск. гос. техн. ун-т им. Н.Э. Баумана . — М.: Интелвак, 2001-2002. — 152 с. — ISBN 5-932640-43-X. Contents
Preface
About the Authors
Using Precise Mechanisms in Mode Vacuum Technological Equipment
Typical Vacuum Mechanisms
Friction in Vacuum
Matrix Method of the Design of New Mechanisms Structure
Precision of Vacuum Mechanisms
Vacuum Mechanisms of Nanoscale Precision
Ultrahigh Vacuum Rotary-Motion Feedthroughs
Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs
Vacuum Frictionless Mechanisms
Flow of Microparticles Originating from Mechanisms in Vacuum